Low‐Cost Fabrication of Transparent Hard Replica Molds for Imprinting Lithography

Kim, Joohee; Kim, Mi-Hee; Lee, Min Jung; Lee, Ji Soo; Shin, Kyusoon; Kim, Youn Sang

doi:10.1002/adma.200803243

Cited by 19 publications

(15 citation statements)

References 27 publications

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“…On the other hand, sufficient elasticity is crucial for the conformal contact. With the aim of solving this issue, many research efforts have been made and the multilayer soft mold [17,18] and surface modification method [19] seem to be good choices. In this study, we used an embedded glass to increase the stiffness of the PDMS mold in view of simplifying the fabrication process; besides, this improvement has no influence on the physical features of the PDMS mold, which can still maintain the conformal contact and absorb the solvent.…”

Section: B Fabrication Of the Glass-embedded Pdms Moldmentioning

confidence: 99%

Deformation grating fabrication technique based on the solvent-assisted microcontact molding

2014

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A deformation grating fabrication technique based on solvent-assisted microcontact molding (SAMIM) is reported in this paper. The fabrication process can be divided into three steps: imprinting a grating on a medium polymer substrate (MPS) by SAMIM, coating a thin metal film on the MPS, and transferring the film to the measured surface. In order to increase the stiffness of the elastic mold without decreasing its conformal contact formation ability, a re-useable, glass-embedded polydimethylsiloxane (PDMS) mold is used. In addition, a characterization method based on the Fourier transform and phase analysis is proposed to check the quality of the fabricated grating. Verified by experiment, the proposed fabrication technique can fabricate a high-frequency large-area grating on different specimens, which can be a qualified deformation sensor for the moiré method.

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Section: B Fabrication Of the Glass-embedded Pdms Moldmentioning

confidence: 99%

Deformation grating fabrication technique based on the solvent-assisted microcontact molding

2014

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“…They are also relatively inefficient methods in terms of processing time and energy [2,3,6,9]. Therefore, some researchers have studied the replication of nano-scale patterns via the soft lithographic concept, which is more efficient and requires a lower processing cost [2,3,6,9,12]. One of the main advantages of soft lithography techniques is that the nanostructures can easily be transferred into the functional substrate so that thereby a number of possible applications can be realized [13][14][15].…”

Section: Introductionmentioning

confidence: 99%

Reversible creation of nanostructures between identical or different species of materials

Jang

Park

et al. 2012

Appl. Phys. A

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In this study, accurate nanostructures with various aspect ratios are created on several types of material. This work is highly applicable to the energy, optical, and nano-bio fields, for example. A silicon (Si) nano-mold is preserved using the method described, and target nanostructures are replicated reversibly and unlimitedly to or from various hard and soft materials. It is also verified that various materials can be applied to the substrates. The results confirm that the target nanostructures are successfully created in precise straight line structures and circle structures with various aspect ratios, including extremely high aspect H.-I. Jang and Prof. S. Ko are contributed equally to this paper. ratios of 1 : 18. It is suggested that the optimal replicating and demolding process of nanostructures with high aspect ratios, which are the most problematic, could be controlled by means of the surface energy between the functional materials. Relevant numerical and analytical studies are also performed. It is possible to expand the applicability of the nanostructured mold by adopting various backing materials, including rounded substrates. The scope of the applications is extended further by transferring the nanostructures between different species of materials including metallic materials as well as identical species.

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“…Recently Kim et al introduced the PDMS coating technology onto various hard and soft molds including these stiffer polymers. The PDMS-coated molds showed good surface properties, i.e., low surface energy and low adhesion properties, like normal PDMS molds [ 17 , 18 ]. It was previously reported that to create a strong and highly stable PDMS coating, the oxidized polymer surface must be treated with 3-aminopropyltriethoxysilane [APTES] before PDMS deposition.…”

Section: Introductionmentioning

confidence: 99%

Effective surface oxidation of polymer replica molds for nanoimprint lithography

2012

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In nanoimprint lithography, a surface oxidation process is needed to produce an effective poly(dimethylsiloxane) coating that can be used as an anti-adhesive surface of template molds. However, the conventional photooxidation technique or acidic oxidative treatment cannot be easily applied to polymer molds with nanostructures since surface etching by UV radiation or strong acids significantly damages the surface nanostructures in a short space of time. In this study, we developed a basic oxidative treatment method and consequently, an effective generation of hydroxyl groups on a nanostructured surface of polymer replica molds. The surface morphologies and water contact angles of the polymer molds indicate that this new method is relatively nondestructive and more efficient than conventional oxidation treatments.

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Low‐Cost Fabrication of Transparent Hard Replica Molds for Imprinting Lithography

Cited by 19 publications

References 27 publications

Deformation grating fabrication technique based on the solvent-assisted microcontact molding

Deformation grating fabrication technique based on the solvent-assisted microcontact molding

Reversible creation of nanostructures between identical or different species of materials

Effective surface oxidation of polymer replica molds for nanoimprint lithography

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