Molecular or cluster ions are often observed in the atom probe microanalysis of III-V compound semiconductors. Here, in-depth data analysis of a series of experiments on GaSb reveals strong variations in the mass spectrum, cluster ion appearance and multiplicity of the detector-events with respect to the effective electric field at the specimen surface. These variations are discussed in comparison with Al 6XXX series alloys and pure W and it is proposed that they may originate from field-dissociation of molecular ions, which might contribute to compositional inaccuracies.
Abstract
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