Low-energy high-current plasma immersion implantation of nitrogen ions in plasma of non-self-sustained arc discharge with thermionic and hollow cathodes

Koval, N. N.; Ryabchikov, A. I.; Sivin, D. O.; Lopatin, I. V.; Крысина, О. В.; Akhmadeev, Yu. Kh.; Ignatov, D. Yu.

doi:10.1016/j.surfcoat.2018.02.064

Cited by 34 publications

(13 citation statements)

References 25 publications

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“…Apart from electronical engineering, many materials are industrially processed with non-equilibrium plasmas. An example is a surface modification process of metals (SUS or Ti) with nitrogen radicals with nitrogen plasma, where the surface nitride or atomic nitrogen diffusion layer strongly hardens the surface, which offers practical hardness and durability of many metallic tools such as cutting edge of drills or lathes, cylinders of automobile engine, or even turbine blades [18,19].…”

Section: Introductionmentioning

confidence: 99%

Optical Emission Spectroscopic (OES) analysis for diagnostics of electron density and temperature in non-equilibrium argon plasma based on collisional-radiative model

Akatsuka

2019

Advances in Physics: X

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This paper describes the use of Optical Emission Spectroscopy (OES) to measure electron densities and temperatures in nonequilibrium plasmas. The ways to interpret relative lineintensities of neutral argon atoms are evaluated based upon a collisional-radiative model including atomic collisional processes. A conversion from an excitation temperature determined from relative line intensities assuming a Boltzmann population distribution to the thermal electron temperature in the electron temperature range 1-4 eV and electron density range 10 10-10 12 cm-3 is given. Procedures to obtain electron temperature T e and density N e of non-equilibrium argon plasma by OES measurement with collisional radiative model.

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Section: Introductionmentioning

confidence: 99%

Optical Emission Spectroscopic (OES) analysis for diagnostics of electron density and temperature in non-equilibrium argon plasma based on collisional-radiative model

Akatsuka

2019

Advances in Physics: X

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“…Application to conductive products immersed in plasma of high-voltage pulses at the gas pressure of ~0.01 Pa enables the plasma immersion ion implantation for various products [30][31][32][33][34][35][36][37][38][39]. At this pressure, ions accelerated in the sheath between a conductive product and plasma pass through the sheath without collisions.…”

Section: Discussionmentioning

confidence: 99%

Surface Modification of Dielectric Substrates by Broad Beams of High-Energy Atoms of Inert Gases

Metel¹,

Grigoriev²,

Волосова³

et al. 2020

Technologies

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We present a new method to generate a neutral beam for surface treatment of materials by fast atoms of inert gases. The new method allows for treatment at lower pressures enlarging the scope for glow discharge applications. To generate the monoenergetic neutral beam, a grid composed of parallel plates is placed inside a vacuum chamber, a glow discharge plasma was generated, and a beam was formed by pulsing the grid to 30 kV to extract ions from the glow discharge. The ions were then neutralized by small-angle scattering at the surfaces of the grid. By applying the high voltage for 50 µs with a repetition frequency of 50 Hz, heating of the target could be limited to 100 °C (instead of 700 °C when running continuously). We present results showing the uniformity of the created beam and its energy distribution using Doppler-shift measurement. Finally, we show friction measurement of treated alumina pieces as a working example of an application of this technology.

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“…The combined arc technology was modernized in [48] where the process chamber plays the role of an anode in the hollow cathode glow discharge. Inside a cylindrical hollow cathode mounted on the chamber is located a thermionic cathode made of tungsten wire.…”

Section: Discussionmentioning

confidence: 99%

Equipment and Technology for Combined Ion–Plasma Strengthening of Cutting Tools

et al. 2018

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Y.A.M.); m.volosova@stankin.ru (M.A.V.)Abstract: A combined strengthening of cutting tools for finishing has been carried out in glow discharge plasma filling a process vacuum chamber. At the first stage, reamers rotating around the axis distanced from the magnetron targets at 8 cm were bombarded by fast argon atoms produced due to charge exchange collisions of ions accelerated in space charge sheathes between the plasma and a negatively biased to 3 kV grid with a 25 cm radius of its concave surface curvature. The reamer bombardment by fast neutral atoms led to a reduction of its cutting-edge radius from~7 µm to~2 µm. At the second stage, the reamer surface was nitrided within 1 h at a temperature of 500 • C stabilized by regulation of the negative bias voltage accelerating the nitrogen ions. At the third stage, a 3 µm thick TiN coating has been synthesized on the reamer bombarded by pulsed beams of 3 keV neutral atoms at a 50 Hz repetition rate of 50 µs wide pulses. After the combined strengthening, the cutting edge radius of the coated reamer amounted to~5 µm and the roughness of the area machined by the reamer holes in blanks made of structural steel reduced by about 1.5 times.

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Low-energy high-current plasma immersion implantation of nitrogen ions in plasma of non-self-sustained arc discharge with thermionic and hollow cathodes

Cited by 34 publications

References 25 publications

Optical Emission Spectroscopic (OES) analysis for diagnostics of electron density and temperature in non-equilibrium argon plasma based on collisional-radiative model

Optical Emission Spectroscopic (OES) analysis for diagnostics of electron density and temperature in non-equilibrium argon plasma based on collisional-radiative model

Surface Modification of Dielectric Substrates by Broad Beams of High-Energy Atoms of Inert Gases

Equipment and Technology for Combined Ion–Plasma Strengthening of Cutting Tools

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