2021
DOI: 10.1016/j.vacuum.2021.110123
|View full text |Cite
|
Sign up to set email alerts
|

Low-inertia method of control over nitrogen concentration in the PVD nitride coatings by non-self-sustained arc discharge with thermionic and hollow cathodes

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2

Citation Types

0
2
0

Year Published

2021
2021
2024
2024

Publication Types

Select...
6

Relationship

0
6

Authors

Journals

citations
Cited by 10 publications
(2 citation statements)
references
References 25 publications
0
2
0
Order By: Relevance
“…PN can be performed using various types of plasma source based on radiofrequency inductively coupled plasma (RF-ICP) [15][16][17][18], direct current (DC) glow [19,20] or arc discharges [21], microwave electron cyclotron (ECR) plasma [22], and others [23]. Unlike other techniques, PN based on RF-ICP has a higher nitriding rate [17].…”
Section: Introductionmentioning
confidence: 99%
“…PN can be performed using various types of plasma source based on radiofrequency inductively coupled plasma (RF-ICP) [15][16][17][18], direct current (DC) glow [19,20] or arc discharges [21], microwave electron cyclotron (ECR) plasma [22], and others [23]. Unlike other techniques, PN based on RF-ICP has a higher nitriding rate [17].…”
Section: Introductionmentioning
confidence: 99%
“…In such systems at a low gas pressure, the volume of the cathode cavity can achieve 0.5 m 3 [3,4]. The application of the steady-state and pulsed discharges with a hollow cathode in obtaining electron and ion beams should also be mentioned [2,[8][9][10][11][12][13]. * Author to whom any correspondence should be addressed.…”
Section: Introductionmentioning
confidence: 99%