2006
DOI: 10.1002/mop.21367
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Low-loss interconnection between electro-optic and passive polymer waveguides for planar lightwave circuits

Abstract: A simple low‐loss interconnection structure between electro‐optic (EO) and passive polymer waveguides is demonstrated. This easy‐to‐fabricate structure is not subject to loss induced by misalignment. Both a conventional structure and an inverted ridge‐waveguide structure are demonstrated. The structure is suitable for planar lightwave circuit (PLC) applications with excess losses for the fabricated interconnections of around 0.1 dB. © 2006 Wiley Periodicals, Inc. Microwave Opt Technol Lett 48: 415–418, 2006; P… Show more

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Cited by 7 publications
(8 citation statements)
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“…The ideal case is APC-DH6 is removed and SU-8 is just revealed. Our simulation and experiment results show that the tolerance is around 0.2pim on this etching process [7]. This means a very thin (less than 0.2pm) layer of APC-DH6 can be left on the top of SU-8 or SU-8 film can be overetched a little, less than 0.2pim, without a significant effect on the transmission properties of the interconnection.…”
Section: Device Fabricationmentioning
confidence: 78%
See 3 more Smart Citations
“…The ideal case is APC-DH6 is removed and SU-8 is just revealed. Our simulation and experiment results show that the tolerance is around 0.2pim on this etching process [7]. This means a very thin (less than 0.2pm) layer of APC-DH6 can be left on the top of SU-8 or SU-8 film can be overetched a little, less than 0.2pim, without a significant effect on the transmission properties of the interconnection.…”
Section: Device Fabricationmentioning
confidence: 78%
“…The optical loss of SU-8 is about 0.5dB/cm at 1.3ptm and it is known to have very good processibility and mechanical properties. As shown in [7], the average excess loss of the fabricated waveguide interconnections is around 0.1 dB.…”
Section: Ow167pdfmentioning
confidence: 93%
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“…If the index of the passive material is similar to the active material, standard butt-coupling is also promising. 31 Furthermore, recently development of polymers with very high electro-optic r 33 coefficients of more than 300 pm/V have been investigated. The r 33 coefficient of 300 pm/V is more than a factor of 10 larger than the one in this work.…”
Section: Resultsmentioning
confidence: 99%