2010
DOI: 10.1016/j.tsf.2010.03.011
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Low-loss optical waveguides for the near ultra-violet and visible spectral regions with Al2O3 thin films from atomic layer deposition

Abstract: In this work, we report low-loss single-mode integrated optical waveguides in the near ultra-violet and visible spectral regions with aluminum oxide (Al 2 O 3 ) films using an atomic layer deposition (ALD) process. Alumina films were deposited on glass and fused silica substrates by the ALD process at substrate/chamber temperatures of 200 °C and 300 °C. Transmission spectra and waveguide measurements were performed in our alumina films with thicknesses in the range of 210 -380 nm for the optical characterizati… Show more

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Cited by 89 publications
(51 citation statements)
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“…In previous works [23][24][25] we have described the overall design, fabrication, and application of a single-mode, electro-active, integrated optical waveguide (SM-EA-IOW) as a platform (see Fig. 1) for spectroelectrochemical investigations using optical impedance measurements of a particular type of redox event at a certain specific condition on the electrode interface.…”
Section: Introductionmentioning
confidence: 99%
“…In previous works [23][24][25] we have described the overall design, fabrication, and application of a single-mode, electro-active, integrated optical waveguide (SM-EA-IOW) as a platform (see Fig. 1) for spectroelectrochemical investigations using optical impedance measurements of a particular type of redox event at a certain specific condition on the electrode interface.…”
Section: Introductionmentioning
confidence: 99%
“…The chemical precursors used for the ALD growth of the alumina film were tri-methyl-aluminum and water. Those precursors were alternatively injected inside the deposition chamber under vacuum to create a self-limiting monolayer for each cycle 40 . The deposition temperature in the reaction chamber was set at 250 °C, and 1690 cycles were required to reach the target thickness of approximately 178 nm.…”
Section: Methodsmentioning
confidence: 99%
“…In this study for fixed RI calculations, we assume that the prism is a BK7 glass with a triangular shape, and its RI is 1.51. The RIs of the sensor's layers were interpolated from the literature [13,14].…”
Section: Optical Propertiesmentioning
confidence: 99%