In this work, we report low-loss single-mode integrated optical waveguides in the near ultra-violet and visible spectral regions with aluminum oxide (Al 2 O 3 ) films using an atomic layer deposition (ALD) process. Alumina films were deposited on glass and fused silica substrates by the ALD process at substrate/chamber temperatures of 200 °C and 300 °C. Transmission spectra and waveguide measurements were performed in our alumina films with thicknesses in the range of 210 -380 nm for the optical characterization. Those measurements allowed us to determine the optical constants (n w and k w ), propagation loss, and thickness of the alumina films. The experimental results from the applied techniques show good agreement and demonstrate a lowloss optical waveguide. Our alumina thin-film waveguides is well transparent in the whole visible spectral region and also in an important region of the UV; the measured propagation loss is below 4 dB/cm down to a wavelength as short as 250 nm. The low propagation loss of these alumina guiding films, in particular in the near ultra-violet region which lacks materials with high optical performance, is extremely useful for several integrated optic applications.

In this work, we report experimental results on the molar absorptivity of cytochrome c adsorbed at different submonolayer levels onto an aluminum oxide waveguide surface; our data show a clear dependence of the protein optical properties on its surface density. The measurements were performed using the broadband, single-mode, integrated optical waveguide spectroscopic technique, which is an extremely sensitive tool able to reach submonolayer levels of detection required for this type of studies. This investigation focuses on the molar absorptivity at the Q-band (centered at 525 nm) and, for the first time to our knowledge, the weak charge transfer (CT) band (centered at 695 nm) of surface-adsorbed cyt c. Polarized light in the spectral region from 450 to 775 nm was all-coupled into an alumina thin film, which functioned as a single-mode planar optical waveguide. The alumina thin-film waveguide used for this work had a thickness of 180 nm and was deposited on a glass substrate by the atomic layer deposition process. The protein submonolayer was formed on the alumina waveguide surface through electrostatic adsorption from an aqueous buffer solution at neutral pH. The optical properties of the surface-adsorbed cyt c were investigated for bulk protein concentrations ranging from 5 nM to 8200 nM in the aqueous buffer solution. For a protein surface density of 2.3 pmol/cm 2 , the molar absorptivity measured at the charge transfer band was 335 M −1 cm −1 , and for a surface density of 15 pmol/cm 2 was 720 M −1 cm −1 , which is much closer to the value of cyt c dissolved in an aqueous neutral buffer (830 M −1 cm −1 ). The modification of the protein molar absorptivity and its dependence on the surface density can most likely be attributed to conformational changes of the surface-adsorbed species.

We report here the experimental demonstration of a high-performance optical waveguide resonance (WR) platform based on a judicious design of a dielectric/metal stack and a fabrication process that delivers an extraordinarily low-loss optical waveguide over a noble-metal thin film. By using an atomic layer deposition process to grow a dielectric film (Al 2 O 3 ) of exceptional optical quality and precise thickness over a metal layer (Ag), we have reached a deep and narrow WR that allowed us to experimentally measure a performance of the WR device that is 20 times superior to the conventional surface plasmon resonance sensor. To the best of our knowledge, these results represent the best performance of a WR device reported so far in the literature. In addition, we have created an experimental setup based on diffraction-limited optical components to launch and collect a broad angular spectrum that is able to resolve the sharp angular waveguide resonance at a fast pace. Such configuration has enabled us to reach nanosecond time scale resolution, and we provide here experimental evidence of the fast coupling of the optical signal from a submonolayer of a ruthenium complex adsorbed to the interrogation surface. The high sensitivity and nanosecond detection capability of the WR optical platform demonstrated here are expected to find useful applications for researchers interested in studies of surfacemediated molecular interactions and interfacial phenomena.

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