Low-noise MEMS vibration sensor for geophysical applications

Bernstein, J.; Miller, Raanan A.; Kelley, W.; Ward, Paul A. S.

doi:10.1109/84.809058

Cited by 121 publications

(55 citation statements)

References 5 publications

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“…10 shows a snap-shot of the test structures at the oscillation frequency of 257 Hz. Only the structure with 30 -wide springs is resonating. Because of the large oscillation amplitude, beams on the shrunk side are almost attached to each other.…”

Section: Evaluation Of Parylene High-aspect-ratio Beammentioning

confidence: 99%

“…4 . The Brownian equivalent acceleration noise is given by (1) where , , and are, respectively, the Boltzman constant, temperature, and the weight of the proof mass [30]. In the present accelerometer, , which is the lowest resonant frequency among MEMS accelerometers ever built.…”

Section: Prototype In-plane Accelerometermentioning

confidence: 99%

“…Fig. 3(a) shows an SEM image of a free-standing cantilever beam 30 in width, 400 in height, and 2.5 mm in length (aspect ratio of 13.3). A triangle-shaped trench etched into the substrate works well as an anchor.…”

Section: Fabrication Of Parylene High-aspect-ratio Structuresmentioning

confidence: 99%

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Micromachined High-Aspect-Ratio Parylene Spring and Its Application to Low-Frequency Accelerometers

Suzuki

Tai

2006

J. Microelectromech. Syst.

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Abstract-A new microfabrication technology for high-aspectratio parylene structure has been developed for soft spring applications. Free-standing parylene beams with widths of 10-40 m and aspect ratios of 10-20 have been successfully fabricated. Since parylene has a small Young's modulus, a high-aspect-ratio beam with a spring constant of the order of 1 10 3 N m has been realized. The large yield strain of parylene enables a test structure to have a large-amplitude oscillation of 600 m p-p , without any failure of the high-aspect-ratio springs. An early prototype of in-plane capacitive accelerometer was also developed. It was found that its resonant frequency is as low as 37 Hz, and the noise spectral density is 64 g (Hz) 0 5 .[1606]Index Terms-Capacitive accelerometer, high-aspect-ratio beam, low spring constant, parylene.

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Section: Evaluation Of Parylene High-aspect-ratio Beammentioning

confidence: 99%

Section: Prototype In-plane Accelerometermentioning

confidence: 99%

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Micromachined High-Aspect-Ratio Parylene Spring and Its Application to Low-Frequency Accelerometers

Suzuki

Tai

2006

J. Microelectromech. Syst.

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“…The current state of the art is to use sensors based on the socalled servo-accelerometer principle and produced using contemporary semiconductor manufacturing technologies, i.e. Micro-Electro-Mechanical Systems (MEMS), as described, e.g., in [13], [16]- [18]. The use of one type of the MEMS type servo-accelerometer for this purpose will be illustrated further on.…”

Section: Specifics Of the Vibration Measurement In Transport Meansmentioning

confidence: 99%

Compact Vibration Measuring System for in-vehicle Applications

Stein¹,

Chmúrny²,

Rosík³

2011

Measurement Science Review

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Low frequency vibrations occurring in ground transportation are of interest in research of the driver's and the passenger's comfort and in seating dynamics research. Piezoelectric accelerometers commonly used for vibration measurement are not well suited for the analysed frequency range. Hence, other sensors capable of measuring accelerations down to the sub-Hertz region have to be used. MEMS acceleration sensors are particularly suitable for such purposes. A compact measuring system employing two three-axial MEMS accelerometers interfaced via a USB data acquisition unit to a laptop was designed and constructed. The digitised data were then processed by scripts in Matlab ® with the aim of analysing both the effect of vibration on a seated person and the dynamic properties of the seat. Preliminary results of a test run with a passenger automobile are presented.

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“…Such sensors have low temperature dependence, low power consumption and low noise compared to other technologies. In recent years, there have been quite a number of development activities on micro-electro-mechanical system (MEMS) based capacitive accelerometers and gyroscopes (Yazdi and Najafi, 1997;Zhang et al, 1999;Bernstein et al, 1999). Such MEMS sensors are fabricated either in surface or bulk micromachining technology.…”

Section: Introductionmentioning

confidence: 99%

An ultra-low noise capacitance to voltage converter for sensor applications in 0.35  µm CMOS

Utz

Walk

Haas

et al. 2017

J. Sens. Sens. Syst.

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Abstract. In this paper we present a readout circuit for capacitive micro-electro-mechanical system (MEMS) sensors such as accelerometers, gyroscopes or pressure sensors. A flexible interface allows connection of a wide range of types of sensing elements. The ASIC (application-specific integrated circuit) was designed with a focus on ultra-low noise operation and high analog measurement performance. Theoretical considerations on system noise are presented which lead to design requirements affecting the reachable overall measurement performance. Special emphasis is put on the design of the fully differential operational amplifiers, as these have the dominant influence on the achievable overall performance. The measured input referred noise is below 50 zF/ √Hz within a bandwidth of 10 Hz to 10 kHz. Four adjustable gain settings allow the adaption to measurement ranges from ±750 fF to ±3 pF. This ensures compatibility with a wide range of sensor applications. The full input signal bandwidth ranges from 0 Hz to more than 50 kHz. A high-precision accelerometer system was built from the described ASIC and a high-sensitivity, low-noise sensor MEMS. The design of the MEMS is outlined and the overall system performance, which yields a combined noise floor of 200 ng/ √ Hz, is demonstrated. Finally, we show an application using the ASIC together with a CMOS integrated capacitive pressure sensor, which yields a measurement signal-to-noise ratio (SNR) of more than 100 dB.

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Low-noise MEMS vibration sensor for geophysical applications

Cited by 121 publications

References 5 publications

Micromachined High-Aspect-Ratio Parylene Spring and Its Application to Low-Frequency Accelerometers

Micromachined High-Aspect-Ratio Parylene Spring and Its Application to Low-Frequency Accelerometers

Compact Vibration Measuring System for in-vehicle Applications

An ultra-low noise capacitance to voltage converter for sensor applications in 0.35  µm CMOS

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Low-noise MEMS vibration sensor for geophysical applications

Cited by 121 publications

References 5 publications

Micromachined High-Aspect-Ratio Parylene Spring and Its Application to Low-Frequency Accelerometers

Micromachined High-Aspect-Ratio Parylene Spring and Its Application to Low-Frequency Accelerometers

Compact Vibration Measuring System for in-vehicle Applications

An ultra-low noise capacitance to voltage converter for sensor applications in 0.35 µm CMOS

Contact Info

Product

Resources

About

An ultra-low noise capacitance to voltage converter for sensor applications in 0.35  µm CMOS