Low power perforated membrane microheater

Adedokun, George; Geng, Lihua; Xie, Dongcheng; Xu, Lei

doi:10.1016/j.sna.2021.112607

Cited by 12 publications

(9 citation statements)

References 14 publications

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“…We employ Joule heating physics, incorporating its current (ec) and heat transfer in solids (ht) modules to simulate both conduction and convective heat transfer. The Joule heat generated by the voltage applied to the heater is coupled to the solid heat transfer physical field by the following formula [ 9 ]:

where T is the temperature,

is the heat capacity,

is the material density, k is the thermal conductivity, and Q is the heat source. The initial boundary conditions for ambient temperature and gas sensor materials are set at 25 °C.…”

Section: Results and Discussionmentioning

confidence: 99%

“…When the current passes through the heater electrode, part of the joule heat generated by the resistance is used to heat the micro-hotplate chip, and the other part is dissipated to the surrounding environment in the way of conduction, convection and radiation [ 8 ]. Reducing the size of the micro-heater is the most effective way to reduce overall power consumption [ 9 ]. Prajapati et al report an ultra-low-power platform with nanoheater of size 4

m × 100 nm, which consumes ∼1.8 mW power when operated continuously at 300 °C [ 10 ].…”

Section: Introductionmentioning

confidence: 99%

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Design and Simulation of an Ultra-Low-Power Hydrogen Sulfide Gas Sensor with a Cantilever Structure

Tian,

Tao,

et al. 2024

Micromachines

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Metal oxide gas sensors usually require a few tens of milliwatts of power consumption to operate at high temperature, which limits their application in mobile and portable devices. Here, we proposed a cantilever structure to build an ultra-low power gas sensor for hydrogen sulfide gas detection. By employing a nano-film size effect to reduce the thermal conductivity of the material, and self-heated corrugation configuration, the power consumption of the gas sensor is significantly reduced. Through numerical analysis and finite element simulation, two different gas sensors were designed and the power consumption and stress distribution were analyzed and optimized. Under the operating temperature of 200 °C, only 0.27 mW power is consumed, the stress value is less than 250 MPa and the displacement is a few hundred of nanometers. The results serve as a guide and reference for ultra-low power MEMS device designs.

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where T is the temperature,

is the heat capacity,

is the material density, k is the thermal conductivity, and Q is the heat source. The initial boundary conditions for ambient temperature and gas sensor materials are set at 25 °C.…”

Section: Results and Discussionmentioning

confidence: 99%

m × 100 nm, which consumes ∼1.8 mW power when operated continuously at 300 °C [ 10 ].…”

Section: Introductionmentioning

confidence: 99%

Design and Simulation of an Ultra-Low-Power Hydrogen Sulfide Gas Sensor with a Cantilever Structure

Tian,

Tao,

et al. 2024

Micromachines

View full text Add to dashboard Cite

show abstract

“…Second, a proper geometry design of the microheater and cantilever is also important to achieve further optimized thermal–mechanical properties. For instance, to make the central part of temperature distribution of the heater more uniform, different kinds of shapes illustrated in Table have been investigated, such as line, spiral, circular, meander, and mesh patterns. − …”

Section: Ultralow-power Mems Gas Sensor Designmentioning

confidence: 99%

Challenges and Opportunities of Chemiresistors Based on Microelectromechanical Systems for Chemical Olfaction

et al. 2022

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Microelectromechanical-system (MEMS)-based semiconductor gas sensors are considered one of the fastest-growing, interdisciplinary high technologies during the post-Moore era. Modern advancements within this arena include wearable electronics, Internet of Things, and artificial brain-inspired intelligence, among other modalities, thus bringing opportunities to drive MEMSbased gas sensors with higher performance, lower costs, and wider applicability. However, the high demand for miniature and micropower sensors with unified processes on a single chip imposes great challenges. This review focuses on recent developments and pitfalls in MEMS-based micro-and nanoscale gas sensors and details future trends. We also cover the background of the topic, seminal efforts, current applications and challenges, and opportunities for next-generation systems.

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“…Adedokun G et al designed a modified structured two beams suspended membrane microheater with a perforated dielectric layer. The test result shows an 18.6 % reduction in power consumption with 15.18mW at 400 ℃, which has a good thermal stability 10 . Therefore, it is particularly important to balance temperature uniformity, power consumption and thermal stability when designing micro-hot plate structures.…”

Section: Introductionmentioning

confidence: 96%

Demonstration of a micro-hotplate chip with a good temperature uniformity

Tian,

Tao,

Zhao

2024

Fifteenth International Conference on Signal Processing Systems (ICSPS 2023)

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The gas sensor based on Micro-electromechanical system (MEMS) technology has the advantages of high sensitivity, small size, good batch uniformity and low power consumption. It has become an important development direction of the next generation semiconductor gas sensor. This paper focuses on the design of the micro-hotplate chip for MEMS gas sensors. A type of micro-hotplate chip design with an isothermal hot area (±15 K) accounting for 90% is demonstrated through both the thermal theory analysis and the finite element simulation of the physical field, effectively resolving the issue of broad area uniform heating in the micro-sized chip in MEMS gas sensor designs. The infrared thermal image test results show the temperature of four points from edge to center of heating area are 295.5 °C, 287.5 °C, 289 °C, 294.8 °C respectively, which indicates the heat uniformity of micro-hotplate. Due to the limitation of a low temperature film deposition process, the maximum stress of the micro-hotplate films is about 1500 MPa, and at 375 °C operating temperature, the power consumption per area is only 4.5×10 -4 mW/μm 2 .

show abstract

Low power perforated membrane microheater

Cited by 12 publications

References 14 publications

Design and Simulation of an Ultra-Low-Power Hydrogen Sulfide Gas Sensor with a Cantilever Structure

Design and Simulation of an Ultra-Low-Power Hydrogen Sulfide Gas Sensor with a Cantilever Structure

Challenges and Opportunities of Chemiresistors Based on Microelectromechanical Systems for Chemical Olfaction

Demonstration of a micro-hotplate chip with a good temperature uniformity

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