Low Pressure Chemical Vapor Deposition as a Tool for Deposition of Thin Film Battery Materials

Oudenhoven, Jfm Jos; Dongen, T. van; Niessen, R.A.H.; Croon, Mart de; Notten, Peter H. L.

doi:10.1149/1.3207652

Cited by 2 publications

(1 citation statement)

References 4 publications

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“…The tin nitride electrodes were mounted as the working electrodes, whereas pure lithium foils were used as counter and reference electrodes, as schematically represented in Ref. 25. The liquid electrolyte used for most of the experiments, denoted as electrolyte 1, comprised 1 M LiClO 4 dissolved in propylene carbonate ͑PC͒.…”

Section: Methodsmentioning

confidence: 99%

Tin Nitride Thin Films as Negative Electrode Material for Lithium-Ion Solid-State Batteries

Baggetto¹,

Verhaegh

Niessen

et al. 2010

J. Electrochem. Soc.

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Tin nitride thin films have been reported as promising negative electrode materials for lithium-ion solid-state microbatteries. However, the reaction mechanism of this material has not been thoroughly investigated in the literature. To that purpose, a detailed electrochemical investigation of radio-frequency-sputtered tin nitride electrodes of two compositions (1:1 and 3:4) is presented for several layer thicknesses. The as-prepared thin films have been characterized by Rutherford backscattering spectrometry, inductively coupled plasma optical emission spectrometry, scanning electron microscopy, X-ray diffraction, and transmission electron microscopy. The electrochemical results point out that the conversion mechanism of tin nitride most probably differs from the conversion mechanism usually observed for other oxide and nitride conversion electrode materials. The electrochemical data show that more than 6 Li per Sn atom can be reversibly exchanged by this material, whereas only about 4 are expected. Moreover, the electrochemical performance of the material is discussed, such as electrode cycle life, and a method for improving the cycle life is presented. Finally, thicker films have been characterized by Mössbauer spectroscopy. This technique opens a new route toward determining the conversion reaction mechanism of this promising electrode material.

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Section: Methodsmentioning

confidence: 99%

Tin Nitride Thin Films as Negative Electrode Material for Lithium-Ion Solid-State Batteries

Baggetto¹,

Verhaegh

Niessen

et al. 2010

J. Electrochem. Soc.

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All‐Solid‐State Lithium‐Ion Microbatteries: A Review of Various Three‐Dimensional Concepts

Oudenhoven

Baggetto

Notten

2010

Advanced Energy Materials

699

638

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With the increasing importance of wireless microelectronic devices the need for on-board power supplies is evidently also increasing. Possible candidates for microenergy storage devices are planar all-solid-state Li-ion microbatteries, which are currently under development by several start-up companies. However, to increase the energy density of these microbatteries further and to ensure a high power delivery, three-dimensional (3D) designs are essential. Therefore, several concepts have been proposed for the design of 3D microbatteries and these are reviewed. In addition, an overview is given of the various electrode and electrolyte materials that are suitable for 3D all-solidstate microbatteries. Furthermore, methods are presented to produce fi lms of these materials on a nano-and microscale.www.MaterialsViews.com REVIEW www.advenergymat.de

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Low Pressure Chemical Vapor Deposition as a Tool for Deposition of Thin Film Battery Materials

Cited by 2 publications

References 4 publications

Tin Nitride Thin Films as Negative Electrode Material for Lithium-Ion Solid-State Batteries

Tin Nitride Thin Films as Negative Electrode Material for Lithium-Ion Solid-State Batteries

All‐Solid‐State Lithium‐Ion Microbatteries: A Review of Various Three‐Dimensional Concepts

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