A new low-temperature sterilization method to replace the ethylene oxide gas sterilization is needed. Strong bactericidal effects of OH and O 2 H radicals are well known. The purpose of this study was to evaluate the sterilization effect of wet oxygen "O 2 +H 2 O" plasma in the bubbling method, confirming the effect of humidity. Sterility assurance was confirmed by using a biological indicator Geobacillus stearothermophilus ATCC7953, Namsa, USA . One hundred and eight samples 10 5 spores/carrier were divided into three groups of 36 in each for treatment with a different type of gas O 2 , O 2 +H 2 O, Air+H 2 O . Plasma processing was conducted using a plasma ashing apparatus 13.56 MHz, PACK-3 ® , Y. A. C., Japan under various gas pressures 13, 25, 50 Pa and gas flows 50, 100, 200 sccm . Fixed plasma treatment parameters were power at 150 W, temperature of 60 , treatment time of 10 min. The samples after treatment were incubated in trypticase soy broth at 58 for 72 h. The negative culture rate in the "O 2 +H 2 O" group was significantly Mantel-Haenszel procedure, p<0.001 higher than in the other gas groups. It is suggested that the significant sterilization effect of the "O 2 +H 2 O" group depends on the bubbling method which is the method of introducing vapor into the chamber. The bubbling method seems able to generate OH and O 2 H radicals in a stable way.