Low resistive silicon substrate as an etch-stop layer for drilling thick SiO2 by spark assisted chemical engraving (SACE)

Ozhikandathil, Jayan; Morrison, Andrew R. T.; Packirisamy, Muthukumaran; Wüthrich, Rolf

doi:10.1007/s00542-011-1248-4

Cited by 4 publications

(1 citation statement)

References 21 publications

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“…Technologies such as deep reactive ion etching (DRIE) 19,20 and laser machining 21 are reported for the highaspect ratio micromachining of silica layer, but they are expensive, complex, and time consuming. Recently, a lowcost, nontraditional micromachining technology called spark assisted chemical engraving (SACE) 22 has been employed for the machining of silica layer deposited on silicon substrate. Development of microfluidic channel and optical waveguide on SOS using SACE is still underway, due to high roughness surface associated with the SACE.…”

Section: Introductionmentioning

confidence: 99%

Silica-on-silicon waveguide integrated polydimethylsiloxane lab-on-a-chip for quantum dot fluorescence bio-detection

Ozhikandathil¹,

Packirisamy²

2012

J. Biomed. Opt.

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Integration of microfluidics and optical components is an essential requirement for the realization of optical detection in lab-on-a-chip (LOC). In this work, a novel hybrid integration of silica-on-silicon (SOS) waveguide and polydymethylsiloxane (PDMS) microfluidics for realizing optical detection based biochip is demonstrated. SOS is a commonly used platform for integrated photonic circuits due to its lower absorption coefficient of silica and the availability of advanced microfabrication technologies for fabricating complicated optical components. However, the fabrication of complex microfluidics circuits on SOS is an expensive process. On the other hand, any complex 3D and high-aspect-ratio microstructures for the microfluidic applications can be easily patterned on PDMS using soft lithography. By exploring the advantages of these two materials, the proposed hybrid integration method greatly simplifies the fabrication of optical LOC. Two simple technologies--namely, diamond machining and soft lithography--were employed for the integration of an optical microfluidic system. Use of PDMS for the fabrication of any complex 3D microfluidics structures, together with the integration of low loss silica-on-silicon photonic waveguides with a straight microfluidic channel, opens up new possibilities to produce low-cost biochips. The performance of SOS-PDMS-integrated hybrid biochip is demonstrated with the detection of laser induced fluorescence of quantum dots. As quantum dots have immense application potential for biodetection, they are used for the demonstration of biodetection.

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