Low-temperature atomic layer deposition of Al₂O₃/alucone nanolaminates for OLED encapsulation

Abstract

Al2O3/alucone laminates were fabricated by atomic layer deposition (ALD) and molecular layer deposition (MLD), showing good barrier properties. These laminates were found to prolong the lifetime of organic light-emitting diodes (OLEDs) evidently.

hBN Flake Embedded Al2O3 Thin Film for Flexible Moisture Barrier

“…We note that the WVTR of 1.8 × 10 − 4 g/m 2 day at 20 nm is a significantly lower value than those of previously reported single-layer thin film barriers ( Figure 4 B) [ 17 , 33 , 34 , 35 , 36 , 37 , 38 , 39 , 40 ]. While bare ALD and PEALD have high WVTR values at thin thickness due to point defects and pinholes at thin thickness, in the case of Al 2 O 3 /hBN/PEI composite, hBN flake and Al 2 O 3 in the composite form a bond and Al-OH formation is suppressed.…”

About the importance of purge time in molecular layer deposition of alucone films

“…14 Further, hybrid organic-inorganic films can also be prepared using common metal-organic precursors and bifunctional organic co-reactants such as alcohols, 13,15,16 phenols, 17 amines 18 and acids. 19 By selecting appropriate precursors and co-reactants, the chemical, mechanical and electrical properties of these hybrid films can be tuned to the benefit of applications such as flexible diffusion barriers, 20,21 low-k dielectric materials, 22 flexible transparent and conducting coatings, 23 non-volatile memories 24,25 and lithium-ion batteries. [26][27][28][29] Hybrid films have also been used to produce porous inorganic membranes by removing the organic content of the films through post-deposition annealing.…”

Retracted Article: Wavelength modulation of ZnO nanowire based organic light-emitting diodes with ultraviolet electroluminescence

“…Recently, organic light emitting diodes (OLEDs) have been extensively studied for their various advantages such as solution-processability, cost-effectiveness, and room temperature processing. [1][2][3][4][5][6] In particular, due to their capability of emitting high-energy ultraviolet (UV) light, high-efficiency UV-OLEDs demonstrate great signicance for IT storage, photocuring, aerospace, medical and military applications. 7,8 In addition, UV-OLEDs can be potentially implemented in RGB screens.…”