2015
DOI: 10.1002/pssr.201510117
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Low‐temperature atomic layer deposition of MoOx for silicon heterojunction solar cells

Abstract: ContentsFull text on our homepage at www.pss-rapid.com FRONT COVERDespite its simple formula, AgO is a complex transition metal oxide, which contains both mono-and trivalent silver cations, i.e. Ag(I)Ag(III)O 2 . Ag(I) (represented by silver balls in the cover image) and Ag(III) (blue balls in the image) form separate layers in the crystal structure of this compound. Disproportionation (i.e. charge density wave) opens up a band gap at the Fermi level and AgO is a narrow band gap semiconductor (ca. 1.0-1.1 eV).… Show more

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Cited by 103 publications
(85 citation statements)
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“…41 Nevertheless we chose to anneal the samples at 300 C in this work, since this annealing temperature has previously been demonstrated to result in a large temporary increase in the refractive index of the film. 10 This increase is attributed to an agglomeration of hydrogen in open volume deficiencies.…”
Section: Resultsmentioning
confidence: 99%
“…41 Nevertheless we chose to anneal the samples at 300 C in this work, since this annealing temperature has previously been demonstrated to result in a large temporary increase in the refractive index of the film. 10 This increase is attributed to an agglomeration of hydrogen in open volume deficiencies.…”
Section: Resultsmentioning
confidence: 99%
“…In recent work, we have already shown the potential of this process for the lowtemperature deposition of selective hole contacts for silicon heterojunction solar cells. 23 Here, we extend the temperature range to 350 C and provide a detailed study of the ALD process and material properties in general.…”
Section: Introductionmentioning
confidence: 99%
“…• C [8,11] and atomic layer deposition of molybdenum oxide at higher temperature was also found to yield low quality contacts [17,18]. Therefore silicon heterojunction solar cells with molybdenum oxide contacts degrade significantly during curing of common silver pastes [11].…”
mentioning
confidence: 99%