Low-temperature growth of carbon nanotube by thermal chemical vapor deposition with FeZrN catalyst

Abstract

Recently the direct growth of carbon nanotubes (CNT) on glass substrates by thermal chemical-vapor deposition at low temperatures has been researched for the fabrication of field-emission displays. We have achieved synthesis of CNT on soda lime glass with a catalyst: FeZrN at low temperature (500–550 °C). The FeZrN film deposited by sputtering is amorphous. However, this film changes into a crystalloid to separate out Fe fine particles by thermal treatment. This characteristic has been successfully applied to make the precursor of CNT. There is a possibility that the density and diameter of CNT can be controlled by varying the composition ratio of FeZrN. The emission from CNT has also been obtained. The turn-on electric field has been ∼2.5–3 V/μm. We have fabricated a microtriode structure and the emission has been also recognized.

Improvement of emission characteristics uniformity of carbon nanotube field emission display by surface treatment

“…[1][2][3][4][5] In our fabrication process of FED, 6,7 the printed CNTs are raised by laser irradiation for the purpose of improving the emission characteristics. 8 Because the emitters have to be controlled in each pixel individually on FED, the uniformity of the emission characteristics is necessary for the uniformity of brightness on the FED screen.…”

Turn-on field distribution of field-emitting sites in carbon nanotube film: Study with luminescent image

“…4 Remarkable progress has been achieved both in CNT cathode preparation [5][6][7] and prototype CNT-FED development. 1-3 CNTs have attracted a lot of study interest and even triggered a new wide industrial interest in FED.…”

Transparent liquid-crystal-based microlens array using vertically aligned carbon nanofiber electrodes on quartz substrates

“…If a transparent substrate is used, this MLA can operate in transmissive mode, making it a more practical and efficient device which could be used in many applications such as optical sensors, wavefront sensing, diffusers and 3D displays. Several papers have been reported on single-and multiwall nanotube growth on transparent substrates by thermal or plasma-enhanced chemical vapor deposition (PECVD) [5][6][7][8], but these tubes are mostly in forest form leading to limited field enhancement and are not useful for photonics as they are highly absorbing (black). Ren et al [9,10] successfully grew vertically aligned CNTs on a glass substrate but these tubes were randomly aligned and are not suitable for our proposed photonic devices, which require a periodic arrangement of the nanofiber electrodes.…”