Low-temperature metalorganic chemical vapor deposition of molybdenum disulfide on multicomponent glass substrates

Low-Power and Ultra-Thin MoS2 Photodetectors on Glass

“…This elimination of carbon is attributed to the use of a carbon-free sulfur precursor (H 2 S), thus eliminating a major source of carbon contaminants. Elimination of carbon (due to H 2 S) and enhanced surface adatom mobility/suppressed nucleation (due to salt) are suspected to be the major factors in the improvements seen in domain size compared to Simonson et al ., which ultimately lead to a higher device performance and low device-to-device variation in MoS 2 photodetectors on glass. The low full-width at half-maximum (FWHM) of the Raman A 1g and E 2g peaks indicates a high degree of crystallinity, which is confirmed by transmission electron microscopy (TEM) imaging (Figure f–h), in which the hexagonal crystal structure with a relatively low density of defects can be observed directly.…”

“…The MoS 2 film is synthesized in a horizontally oriented hotwall MOCVD reactor at 600 °C on a Corning GG substrate. 30 Molybdenum hexacarbonyl, Mo(CO) 6 , and hydrogen sulfide, H 2 S, precursors are used as the molybdenum and sulfur sources, respectively (Figure 1a). Sodium chloride (NaCl), an alkali metal halide, is introduced slightly upstream into the reactor in order to facilitate surface adatom mobility by suppressing nucleation.…”

“…The MoS 2 film is synthesized in a horizontally oriented hot-wall MOCVD reactor at 600 °C on a Corning GG substrate . Molybdenum hexacarbonyl, Mo­(CO) 6 , and hydrogen sulfide, H 2 S, precursors are used as the molybdenum and sulfur sources, respectively (Figure a).…”

“…However, the high-temperature growth (1000 °C) of h-BN, , the nonscalability of IL, and the low dielectric constant of HSQ, diminish their practical applicability. Finally, most of the reports on ultrasensitive 2D photodetectors are based on micro-mechanically exfoliated and single-crystal monolayer flakes, which do not offer a scalable manufacturing solution. ,, While significant progress has been made toward the synthesis of high-quality, uniform TMDCs over a large area using bottom-up techniques such as physical vapor deposition, chemical vapor deposition (CVD), − and metal–organic chemical vapor deposition (MOCVD), − most use high growth temperatures (800–1100 °C) to enhance adatom mobility and minimize carbon contamination. , Such high-temperature syntheses are incompatible with commercially available glass, which require processing temperatures of <650 °C. Nevertheless, the above discussion highlights the challenges for monolithic integration of ultra-low-power photodetectors based on 2D-TMDCs on glass.…”

Molecular understanding of charge effect on desalination performance in lamellar MoS2 membranes

“…MoS 2 also shows application potential in the field of solar desalination by taking advantage of its strong light absorption ability and high light-heat conversion efficiency. 13,14 Large-area MoS 2 sheets have been successfully prepared 15 with the development of metalorganic chemical vapor deposition (MOCVD), which provides the potential for its application in seawater desalination. The MoS 2 membrane could be constructed by utilizing the intrinsic defects 16 in MoS 2 nanosheets, but the pore channels caused by the defects may be too small for water molecules to permeate.…”