2023
DOI: 10.1088/1402-4896/acab8c
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Low-temperature, short-time, wafer-level bonding for Cu/Sn/Cu solid-state-diffusion interconnect in 3-D integration

Abstract: In this paper, Cu/Sn/Cu solid-state diffusion (SSD) under low temperature is proposed and investigated for three-dimensional (3-D) integration. Cu and Sn films were deposited by high-efficiency and low-cost physical vapor deposition to fabricate 40-µm-pitch daisy-chain structures. Subsequently, the Cu bump surface was treated with Ar (5% H2) plasma. The Cu/Sn/Cu structure was bonded face to face at 200 ℃ for 15 min. The interfacial composition of the as-bonded dies comprised five layers, Cu/Cu3Sn/Cu6Sn5/Cu3Sn/… Show more

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“…Moreover, high temperature conditions will accelerate the diffusion of atoms at the solder interface, forming Kirkendall holes and threatening device reliability [ [28] , [29] , [30] ]. Cu–Sn low-temperature solid-state soldering has been considered as a potential solution to the above problems, where the soldering temperature ranges from 150 °C to 220 °C [ 31 , 32 ]. Wang [ 33 ] et al investigated a low-temperature soldering technique using graphene as an interlayer.…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, high temperature conditions will accelerate the diffusion of atoms at the solder interface, forming Kirkendall holes and threatening device reliability [ [28] , [29] , [30] ]. Cu–Sn low-temperature solid-state soldering has been considered as a potential solution to the above problems, where the soldering temperature ranges from 150 °C to 220 °C [ 31 , 32 ]. Wang [ 33 ] et al investigated a low-temperature soldering technique using graphene as an interlayer.…”
Section: Introductionmentioning
confidence: 99%