2014
DOI: 10.1109/tasc.2014.2318315
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Low Temperature Superconducting Tunable Bandstop Resonator and Filter Using Superconducting RF MEMS Varactors

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Cited by 10 publications
(7 citation statements)
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“…Our demonstrated procedure involving a combination of a well-controlled oxide regrowth, different material characterization techniques and measurement of resonator quality factors can be extended to selectively study other metal oxides losses relevant for quantum devices. Furthermore, the demonstrated oxide removal method can be utilized to reduce microwave losses in other devices, such as superconducting qubits, quantumlimited amplifiers [50], microwave kinetic inductance detectors [51], single photon detectors [52] or cryogenic filters [53].…”
Section: Discussionmentioning
confidence: 99%
“…Our demonstrated procedure involving a combination of a well-controlled oxide regrowth, different material characterization techniques and measurement of resonator quality factors can be extended to selectively study other metal oxides losses relevant for quantum devices. Furthermore, the demonstrated oxide removal method can be utilized to reduce microwave losses in other devices, such as superconducting qubits, quantumlimited amplifiers [50], microwave kinetic inductance detectors [51], single photon detectors [52] or cryogenic filters [53].…”
Section: Discussionmentioning
confidence: 99%
“…Tunable superconducting resonators have been extensively researched due to the merits of a high quality factor (Q-factor) and their frequency-tuning functionality. Generally, the tuning methods can be categorized into several groups including electrical [1][2][3], magnetic [4][5][6], optical [7,8], and mechanical ones [9,10]. Since these resonators can realize the frequency alignments of hybrid resonant systems, their potential applications are focused on detecting and processing the information in various forms of magnons, spins, phonons, optical photons, and so on [1,5].…”
Section: Introductionmentioning
confidence: 99%
“…RF MEMS technology, including MEMS switches and varactors, features compact size, very low loss, high linearity, and high power-handling capacity at microwave frequencies [84]. LTS niobium-based superconducting micro-fabrication process was well developed which enabled the monolithic integration of gold-based RF MEMS devices with niobium superconducting RF circuits [85], and reconfigurable MMIC LTS resonator and filter have been developed [86]. The reported Nb reconfigurable bandstop filter demonstrated a sweep of frequency from 2.62 to 2.54 GHz and a discrete shift from 2.54 to 1.95 GHz.…”
Section: Reconfigurable Hts Filtersmentioning
confidence: 99%