2019
DOI: 10.1007/s10800-019-01327-w
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Low-temperature synthesis of GaN film from aqueous solution by electrodeposition

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Cited by 6 publications
(12 citation statements)
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“…Their exploration has continued because of their potential to enable low-cost device application solutions. These techniques include reactive sputtering [51], thermal atomic layer deposition (ALD) [52], pulsed-laser deposition (PLD) [53], activated reactive evaporation (ARE) [54], and electrochemical solution syntheses [55]. Prabaswara et al [51] highlighted the technique of magnetron sputter epitaxy, which is a variant of reactive sputter deposition and a subset of the physical vapor deposition method.…”
Section: Materials Propertiesmentioning
confidence: 99%
See 1 more Smart Citation
“…Their exploration has continued because of their potential to enable low-cost device application solutions. These techniques include reactive sputtering [51], thermal atomic layer deposition (ALD) [52], pulsed-laser deposition (PLD) [53], activated reactive evaporation (ARE) [54], and electrochemical solution syntheses [55]. Prabaswara et al [51] highlighted the technique of magnetron sputter epitaxy, which is a variant of reactive sputter deposition and a subset of the physical vapor deposition method.…”
Section: Materials Propertiesmentioning
confidence: 99%
“…Biju et al [54] reported a modified ARE method based on nitrogen plasmas and gallium evaporation that can be used to grow polycrystalline films. Kang et al [55] further demonstrated the electrochemical deposition of GaN on silicon using an aqueous solution that contained Ga(NO 3 ) 3 and NH 4 NO 3 . These examples further elucidate the motivation of the community to explore alternative deposition techniques for LED and non-LED applications and the direction towards low-cost, scalable production.…”
Section: Materials Propertiesmentioning
confidence: 99%
“…All the electrochemical depositions are performed using a potentiostat (Hokuto Denko, HA3003A) in a three-electrode cell configuration at atmospheric pressure and temperature of 25˚C. As shown by the E-pH diagram of Ga in Figure 1(a) [49], gallium ion (Ga 3+ ) exists in the form of passivated gallium oxide were obtained at this current density [50]. The working and counter electrodes are separated by a distance of approximately 1.0 cm, and the electrolyte is vigorously stirred during the electrodeposition process.…”
Section: Electrodeposition Processmentioning
confidence: 99%
“…Geniş yasak enerji aralığına (Eg) sahip yarıiletkenler (Eg> 3 eV) güç elektroniği uygulamaları açısından üstün özelliklere sahiptir ve bu uygulamalar için gelecek vaat etmektedir (Higashiwaki,2017;Mochalov L, 2020). Galyum tabanlı yarıiletkenler (GaN, Ga2O3) yüksek enerji aralıkları ve yüksek anahtarlama gerilimleri nedeniyle yarıiletken teknolojisi uygulamalarında popüler olmuşlardır (Saron, 2021;Altuntaş, 2014;Kang, 2019).…”
Section: Introductionunclassified
“…(Roy, 2005) Bu çalışmada, elektrodepozisyon çözeltisi farklı oranlardaki galyum nitrat tuzu (Ga(NO3)3xH2O), amonyum nitrat tuzu (NH4NO3) ve deiyonize suyun karıştırılmasıyla hazırlanmıştır ve elektrodepozisyon işlemi oda sıcaklığında gerçekleştirilerek GaN filmler Si ve SnO2 alttaşlar üzerine kaplanmıştır. Bu konu üzerine yapılan diğer çalışmalarda ise üretilen filmin yapısında Galyum, Nitrojen ve Oksijen (GaxOyNz) olduğu rapor edilmiştir (Kang, 2019). Aynı çalışmada, elektrodepozisyon işlemi esnasında elektrotlara sürülen akım yoğunluğu değerine göre Galyum ve Nitrojen arasında bağlanmanın olmadığı ve üretilen filmde Ga2O3 fazlarının baskın olabileceği belirtilmiştir (Kang, 2019).…”
Section: Introductionunclassified