2021
DOI: 10.3390/mi12101237
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Low-Voltage and High-Reliability RF MEMS Switch with Combined Electrothermal and Electrostatic Actuation

Abstract: In this paper, we report a novel laterally actuated Radio Frequency (RF) Microelectromechanical Systems (MEMS) switch, which is based on a combination of electrothermal actuation and electrostatic latching hold. The switch takes the advantages of both actuation mechanisms: large actuation force, low actuation voltage, and high reliability of the thermal actuation for initial movement; and low power consumption of the electrostatic actuation for holding the switch in position in ON state. The switch with an ini… Show more

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Cited by 12 publications
(3 citation statements)
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“…It is therefore important to discuss issues related to MEMS switches and methodology to overcome such issues. The limitations of some MEMS switches are a high actuation voltage requirement, low switching speed, stiction problems, charging of dielectrics, complex structures, reliability issues, and fabrication processes [127][128][129].…”
Section: Key Issues Related To Mems Switches and Improvement Techniquesmentioning
confidence: 99%
“…It is therefore important to discuss issues related to MEMS switches and methodology to overcome such issues. The limitations of some MEMS switches are a high actuation voltage requirement, low switching speed, stiction problems, charging of dielectrics, complex structures, reliability issues, and fabrication processes [127][128][129].…”
Section: Key Issues Related To Mems Switches and Improvement Techniquesmentioning
confidence: 99%
“…Shunti et al, in [23], focused on the introduction of an RF MEMS shunt switch that featured a low pull-in voltage of 5.2 V, achieved through the use of U-shaped meanders. Zhu and Pal, in [24], explored the application of combined electrostatic and electrothermal actuation to create a highly reliable RF MEMS switch that operates at low voltages. However, this approach necessitated a relatively high temperature for the electrothermal actuation.…”
Section: Introductionmentioning
confidence: 99%
“…The authors would like to update the Figures 3 and 7 to the published paper [1] as follows: The changes do not affect the scientific results. We apologize for any inconvenience caused to the readers by these errors.…”
mentioning
confidence: 99%