Low-voltage MEMS optical phase modulators and switches on a indium phosphide membrane on silicon

Liu, Tianran; Pagliano, Francesco; Veldhoven, René van; Pogoretskiy, Vadim; Jiao, Yuqing; Fiore, Andrea

doi:10.1063/1.5128212

Cited by 15 publications

(9 citation statements)

References 33 publications

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“…Figure 8 The plot of the plasma frequency and electron density which form the electron cloud sensors. The sensitivities of 2.31prads-1mm3(electrons)-1, 2.27prads-1mm3(electrons)-1, 2.22prads-1mm3(electrons)-1, 2.38prads-1mm3(electrons)-1 are respectively obtained, where p is Pico (10)(11)(12).…”

Section: Figurementioning

confidence: 99%

“…There are different types of Sagnac interferometers that have been designed, developed, and employed for sensing applications [4][5][6][7][8]. The micro-scale system known as micro-electro-mechanical system (MEMS) technology is used to develop resonators for various applications [9][10][11][12], where the resonators such as panda ring, micro ring, and MZI have been applied. Recently, microring resonators have been widely used in both theoretical and experimental works [13][14][15][16], where the realistic applications have been confirmed.…”

Section: Introductionmentioning

confidence: 99%

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Distributed MEMS Sensors Using Plasmonic Antenna Array Embedded Sagnac Interferometer

et al. 2022

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A micro Sagnac interferometer is proposed for electron cloud distributed sensors formed by an integrated (micro-electro-mechanical systems) MEMS resonator structure. The Sagnac interferometer consists of four microring probes integrated into a Sagnac loop. Each of the microring probes is embedded with the silver bars to form the plasmonic wave oscillation. The polarized light of 1.50µm wavelength is input into the interferometer, which is polarized randomly into upstream and downstream directions. The polarization outputs can be controlled by the space-time input at the Sagnac port. Electrons are trapped and oscillated by the whispering gallery modes (WGMs), where the plasmonic antennas are established and applied for wireless fidelity (WiFi) and light fidelity (LiFi) sensing probes, respectively. Four antenna gains are 2.59dB, 0.93dB, 1.75dB, and 1.16dB, respectively. In manipulation, the sensing probe electron densities are changed by input source power variation. When the electron cloud is excited by the microscopic medium, where the change in electron density is obtained and reflected to the required parameters. Such a system is a novel device that can be applied for brain-device interfering with the dual-mode sensing probes. The obtained WGM sensors are 1.35µm -2 , 0.90µm -2 , 0.97µm -2 and, 0.81µm -2 , respectively. The WGMs behave as a four-point probe for the electron cloud distributed sensors, where the electron cloud sensitivities of 2.31prads -1 mm 3 (electrons) -1 , 2.27prads -1 mm 3 (electrons) -1 , 2.22prads -1 mm 3 (electrons) -1 , 2.38prads -1 mm 3 (electrons) -1 are obtained, respectively.

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Section: Figurementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Distributed MEMS Sensors Using Plasmonic Antenna Array Embedded Sagnac Interferometer

et al. 2022

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“…Recently a novel NOEMS scheme has been demonstrated on the IMOS platform at TU/e. The compact SOA diode and the high optical confinement have enabled a vertically coupled waveguide system [77], as shown in figure 12. Based on this technology, highly efficient phase modulators and ultrawideband displacement sensors have been developed, see section 6.2 and 9.3, respectively.…”

Section: Nano Opto-mechanicsmentioning

confidence: 99%

InP membrane integrated photonics research

Jiao

Nishiyama

Tol

et al. 2020

Semicond. Sci. Technol.

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Recently a novel photonic integration technology, based on a thin InP-based membrane, is emerging. This technology offers monolithic integration of active and passive functions in a sub-micron thick membrane. The enhanced optical confinement in the membrane results in ultracompact active and passive devices. The membrane also enables approaches to converge with electronics. It has shown high potential in breaking the speed, energy and density bottlenecks in conventional photonic integration technologies. This paper explains the concept of the InP membrane, discusses the versatility of various technology approaches and reviews the recent advancement in this field.

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“…A vertically coupled double membrane NEOMS have been realized (see Fig. 3), showing large phase tuning (4.8 π) from a just 140 μm long device [11]. Besides, realizing NEOMS on the IMOS compatible layerstack opens up future monolithic integration with light sources and readout detectors for sensing.…”

Section: Inp Membrane Nanophotonicsmentioning

confidence: 99%

InP membrane technology for photonics electronics convergence

Jiao

Tol

Williams

2020

2020 Opto-Electronics and Communications Conference (OECC)

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Low-voltage MEMS optical phase modulators and switches on a indium phosphide membrane on silicon

Cited by 15 publications

References 33 publications

Distributed MEMS Sensors Using Plasmonic Antenna Array Embedded Sagnac Interferometer

Distributed MEMS Sensors Using Plasmonic Antenna Array Embedded Sagnac Interferometer

InP membrane integrated photonics research

InP membrane technology for photonics electronics convergence

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