Low-voltage puzzle-like fractal microelectromechanial system variable capacitor suppressing pull-in

Elshurafa, Amro M.; Ho, Pak Hung; Radwan, Ahmed G.; Ouda, Mahmoud H.; Salama, Khaled N.

doi:10.1049/mnl.2012.0642

Cited by 17 publications

(7 citation statements)

References 19 publications

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“…As expected, the tuning behavior is not fully linear due to the parasitics coming from the substrate, which is also the case for all parallel-plate MVCs. Generally however, the linearity and TR herein are enhanced when compared to previously reported parallelplate MVCs [1][2][3] due to the multiple pull-ins [14], and the linearity is particularly better than that reported in [14] given the enhanced suspension design.…”

Section: B Deflection Simulationcontrasting

confidence: 54%

Modeling and fabrication of an RF MEMS variable capacitor with a fractal geometry

Elshurafa

Salama

2013

2013 IEEE International Symposium on Circuits and Systems (ISCAS2013)

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Abstract-In this paper, we model, fabricate, and measure an electrostatically actuated MEMS variable capacitor that utilizes a fractal geometry and serpentine-like suspension arms. Explicitly, a variable capacitor that possesses a top suspended plate with a specific fractal geometry and also possesses a bottom fixed plate complementary in shape to the top plate has been fabricated in the PolyMUMPS process. An important benefit that was achieved from using the fractal geometry in designing the MEMS variable capacitor is increasing the tuning range of the variable capacitor beyond the typical ratio of 1.5. The modeling was carried out using the commercially available finite element software COMSOL to predict both the tuning range and pull-in voltage. Measurement results show that the tuning range is 2.5 at a maximum actuation voltage of 10V.

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Section: B Deflection Simulationcontrasting

confidence: 54%

Modeling and fabrication of an RF MEMS variable capacitor with a fractal geometry

Elshurafa

Salama

2013

2013 IEEE International Symposium on Circuits and Systems (ISCAS2013)

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“…[4] In addition, compared to thin-film batteries, μ-SCs charge most efficiently by drawing the maximum current that the source can supply, irrespective of voltage, thereby making supercapacitors more appropriate www.advelectronicmat.de structure. [21,29] Fractal designs have also been theoretically predicted to enhance the performance of electrochemi cal systems since they maximize the electrochemically active surface area while minimizing energy lost during the transport of ions within the fractal network. [21,29] Fractal designs have also been theoretically predicted to enhance the performance of electrochemi cal systems since they maximize the electrochemically active surface area while minimizing energy lost during the transport of ions within the fractal network.…”

Section: Introductionmentioning

confidence: 99%

Fractal Electrochemical Microsupercapacitors

Hota

Jiang

Mashraei

et al. 2017

Adv Elect Materials

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The first successful fabrication of microsupercapacitors (μ‐SCs) using fractal electrode designs is reported. Using sputtered anhydrous RuO2 thin‐film electrodes as prototypes, μ‐SCs are fabricated using Hilbert, Peano, and Moore fractal designs, and their performance is compared to conventional interdigital electrode structures. Microsupercapacitor performance, including energy density, areal and volumetric capacitances, changes with fractal electrode geometry. Specifically, the μ‐SCs based on the Moore design show a 32% enhancement in energy density compared to conventional interdigital structures, when compared at the same power density and using the same thin‐film RuO2 electrodes. The energy density of the Moore design is 23.2 mWh cm−3 at a volumetric power density of 769 mW cm−3. In contrast, the interdigital design shows an energy density of only 17.5 mWh cm−3 at the same power density. We show that active electrode surface area cannot alone explain the increase in capacitance and energy density. We propose that the increase in electrical lines of force, due to edging effects in the fractal electrodes, also contribute to the higher capacitance. This study shows that electrode fractal design is a viable strategy for improving the performance of integrated μ‐SCs that use thin‐film electrodes at no extra processing or fabrication cost.

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“…Fractal geometry has been widely studied in the existing literature, especially in the field of chip design [17,18,19], transducers [20], transformers [21,22,23], couplers [24], transmission lines [25], and capacitors [3,26,27,28,29,30,31]. Among them, the capacitors using fractal design are usually used in microwave liquid crystal tuning capacitors, radio frequency circuits and MEMS fields.…”

Section: Proposed Fractal Capacitor Arraymentioning

confidence: 99%

A lateral field non-binary split weighted capacitor array based on fractal curve for SAR ADC

Zhao

Zhang

Wenxin

2020

IEICE Electron. Express

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A non-binary split-type MOM weighted capacitor array based on fractal geometry for SAR (Successive Approximation Register) ADC is proposed. By taking advantage of the geometric characteristics of the Hilbert curve, the capacitor array avoids the use of complex commoncentroid structure and complex wiring. The test results of the SAR ADC using this capacitor array show that, the measured DNL and INL were −0.26/0.38 LSBs and −0.37/0.38 LSBs, respectively. The ENOB is 8.66 bits. The SAR ADC was implemented using a 180-nm CMOS process with a supply voltage of 1.8 V. Its active area and power consumption are 330 µm × 1190 µm and 1.89 mW, respectively.

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Low-voltage puzzle-like fractal microelectromechanial system variable capacitor suppressing pull-in

Cited by 17 publications

References 19 publications

Modeling and fabrication of an RF MEMS variable capacitor with a fractal geometry

Modeling and fabrication of an RF MEMS variable capacitor with a fractal geometry

Fractal Electrochemical Microsupercapacitors

A lateral field non-binary split weighted capacitor array based on fractal curve for SAR ADC

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