We have developed a technology for automated verification, which can distinguish between serious defects and false alarms. The technology consists of optical equipment for pattern sensing and of pattern verification algorithms. The optical system uses fluorescent, transmitting, and reflective illumination and a CCD camera as sensor. The verification algorithms concurrently use the results of a design rule based comparison and a comparison that is based on CAD data to enhance the accuracy of verification. We also developed a practical inspection system and tested it in a factory environment. The verification time obtained was 1.5 s per pattern. The system correctly identified 1517 defective points without missing any escape and had a false alarm rate of only 0.1%. © 1999 Scripta Technica, Syst Comp Jpn, 30(7): 27–37, 1999