1996
DOI: 10.1117/12.250833
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<title>Analysis of stress-driven delamination in contact vias</title>

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“…8a. 5,6,[12][13][14] From the simulation results reported by Lloyd, 4 the peak stress under the W-plug is a sensitive function of the via geometry and the penetration of the W-plug through the TiN. 8b 11 The activation energy (E a ) and current exponent factor (n) extracted from the wafer-level conventional EM test for all the splits are about 0.88 eV and 1.85, respectively.…”
Section: Stress Migrationmentioning
confidence: 99%
“…8a. 5,6,[12][13][14] From the simulation results reported by Lloyd, 4 the peak stress under the W-plug is a sensitive function of the via geometry and the penetration of the W-plug through the TiN. 8b 11 The activation energy (E a ) and current exponent factor (n) extracted from the wafer-level conventional EM test for all the splits are about 0.88 eV and 1.85, respectively.…”
Section: Stress Migrationmentioning
confidence: 99%