Since the initial demonstration of chemical oxygen iodine lasers in 1977, researchers have realized that the heart of the COIL system is the singlet oxygen generator. This drives the performance of the system in terms of output power, mass efficiency, engineering complexity, reliability and maintainability. For this reason the singlet oxygen generator has been the focus of intense research and development efforts over the last 30 years. This paper reports on the history of singlet oxygen generators -starting with the simple sparger design used in the initial COIL demonstration and ending with current jet or droplet generators used in laboratories around the world. The relative performance of the different generator types will naturally lead to performance goals for the research efforts of the future.