&lt;title&gt;Development and characterization of an ultrathin rapid thermal silicon nitride for IC sensor applications&lt;/title&gt;

Williams, Richard A.; Arias, Louie J.; Hess, Dennis W.

doi:10.1117/12.56675

SPIE Proceedings

1992

DOI: 10.1117/12.56675

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<title>Development and characterization of an ultrathin rapid thermal silicon nitride for IC sensor applications</title>

Richard A. Williams

Louie J. Arias²,

Dennis W. Hess

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<title>Development and characterization of an ultrathin rapid thermal silicon nitride for IC sensor applications</title>

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