&lt;title&gt;Dispersive properties of Co/C sliced multilayer gratings for the 4.4-5 nm wavelength interval&lt;/title&gt;

Bugaev, E. A.; Feshchenko, R. M.; Виноградов, А. В.; Voronov, Dmitriy L.; Tokarev, V. A.; Petukhov, V. P.

doi:10.1117/12.640286

Cited by 4 publications

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“…130 If the grating equation and multilayer Bragg conditions are satisfied simultaneously, it can provide a very high efficiency. 127,131,132 An SMG can be used in both reflection [130][131][132][133][134] and transmission mode, [135][136][137] while the reflection SMG is essentially similar to an ideal multilayer coated blazed grating, as shown in Figure 10. A Mo/Si based SMG with 2020 bilayers and a corresponding grating density of 19 700 line/mm was fabricated by Bajt et al, showing a measured absolute efficiency of 51.4% at k ¼ 13.2 nm.…”

Section: Sliced Multilayer Gratingmentioning

confidence: 99%

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Huang

Медведев

Kruijs

et al. 2017

Applied Physics Reviews

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Extreme ultraviolet and soft X-ray (XUV) multilayer optics have experienced significant development over the past few years, particularly on controlling the spectral characteristics of light for advanced applications like EUV photolithography, space observation, and accelerator- or lab-based XUV experiments. Both planar and three dimensional multilayer structures have been developed to tailor the spectral response in a wide wavelength range. For the planar multilayer optics, different layered schemes are explored. Stacks of periodic multilayers and capping layers are demonstrated to achieve multi-channel reflection or suppression of the reflective properties. Aperiodic multilayer structures enable broadband reflection both in angles and wavelengths, with the possibility of polarization control. The broad wavelength band multilayer is also used to shape attosecond pulses for the study of ultrafast phenomena. Narrowband multilayer monochromators are delivered to bridge the resolution gap between crystals and regular multilayers. High spectral purity multilayers with innovated anti-reflection structures are shown to select spectrally clean XUV radiation from broadband X-ray sources, especially the plasma sources for EUV lithography. Significant progress is also made in the three dimensional multilayer optics, i.e., combining micro- and nanostructures with multilayers, in order to provide new freedom to tune the spectral response. Several kinds of multilayer gratings, including multilayer coated gratings, sliced multilayer gratings, and lamellar multilayer gratings are being pursued for high resolution and high efficiency XUV spectrometers/monochromators, with their advantages and disadvantages, respectively. Multilayer diffraction optics are also developed for spectral purity enhancement. New structures like gratings, zone plates, and pyramids that obtain full suppression of the unwanted radiation and high XUV reflectance are reviewed. Based on the present achievement of the spectral tailoring multilayer optics, the remaining challenges and opportunities for future researches are discussed.

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Section: Sliced Multilayer Gratingmentioning

confidence: 99%

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Huang

Медведев

Kruijs

et al. 2017

Applied Physics Reviews

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“…The slicing and thinning process can produce a multilayer grating with much larger aspect-ratio that can greatly increase the diffraction efficiency of hard X-ray [9] . By depositing a thick multilayer with a layer thickness of only several nanometers, the dispersion power of gratings can be increased [10] . In this letter, a WSi 2 /Si multilayer of 300×14.3-nm periods is deposited and then sliced and polished to create a transmission grating.…”

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confidence: 99%

Fabrication and characterization of sliced multilayer transmission grating for X-ray region

Huang¹,

Li²,

Zhu³

et al. 2012

Chin. Opt. Lett.

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To develop high quality dispersion optics in the X-ray region, the sliced multilayer transmission grating is examined. Dynamical diffraction theory is used to calculate the diffraction property of this volume grating. A WSi2/Si multilayer with a d-spacing of 14.3 nm and bi-layer number of 300 is deposited on a superpolished silicon substrate by direct current magnetron sputtering technology. To make the transmission grating, the multilayer is sliced and thinned in the cross-section direction to a depth of 23-25 µm. The diffraction efficiency of the grating is measured at E = 8.05 keV, and the 1st-order efficiency is 19%. The sliced multilayer grating with large aspect ratio and nanometer period can be used for high efficiency and high dispersion optics in the X-ray region.OCIS With the development of various deposition technologies, multilayers with thousands of layers can now be produced while still maintaining the thickness deviation of each layer within 0.1 nm [1,2] . These smart multilayers have been widely used in astronomical physics, synchrotron radiation, plasma diagnosis, and so on. Apart from the reflection optics realized by high reflectivity multilayer mirrors [3] , another critical element in the extreme ultraviolet (EUV) and X-ray region is the dispersion optics. Conventional dispersion optics is usually provided with gratings [4−6] that are fabricated by etching methods. However, transmission gratings used in the hard Xray region have to fulfill a very large aspect ratio (i.e., the depth of the grating groove divided by the line-width) in order to achieve a practical diffraction efficiency due to the dynamical effect [7,8] . Moreover, new optics in the Xray region require higher dispersion power that, in turn, needs much larger groove density, i.e., very small period of the structure. These harsh requirements cannot be satisfied by etching techniques; as an alternative, sliced multilayer grating is a good solution for these problems. The slicing and thinning process can produce a multilayer grating with much larger aspect-ratio that can greatly increase the diffraction efficiency of hard X-ray [9] . By depositing a thick multilayer with a layer thickness of only several nanometers, the dispersion power of gratings can be increased [10] . In this letter, a WSi 2 /Si multilayer of 300×14.3-nm periods is deposited and then sliced and polished to create a transmission grating. The diffraction efficiency of the grating is measured at 8.05 keV. The measured results demonstrate that the sliced multilayer transmission grating is very promising for applications in high efficiency and high dispersion optics in the X-ray region.In the X-ray region, the transmission grating is required to have a smaller period (in nanometer) and larger depth, i.e., higher aspect ratio. The kinematical diffraction theory is no more suitable for these volume gratings. Instead, the dynamical diffraction theory has to be applied and must consider the interaction and coupling effect between the incident and diffraction waves of d...

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Structure of the core—cladding interface and radiation losses in hollow planar Bragg waveguides

Виноградов¹,

Mitrofanov²

2008

Quantum Electron.

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A comprehensive analysis of gened relativistic spacetimes which admit a shearfree, irrotational and geodesic time-like coogruence is presented. The equations governing the models for a gened energy-momentum tensor are wrilten down. Coordinates in which the metric of such spacetimes takes on a simplified form are established. The general subwses of 'zero anisotropic stress', 'zero heat-flux vector' and 'two-component Ruids' are investigated. In particular, perfect-fluid Friedmann-Robertson-Walker models and spatially homogeneous models are discussed. Models with a variety of physically relevant energy-momentum tensors are considered. Anisowopic fluid models and viscous fluid models with heat conduction are examined. Also. models with B perfect Ruid plus a magnetic field or with pure radiation. and models with two non-collinw perfect fluids (satisfying a variety of physical conditions) are inwtigated. In particular. models with a (single) perfect Ruid which is tilting with respect to the shem-free, vorticity-free and acceleration-free time-like congruence are discussed.PACS numbers: 0420J. 9880H

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<title>Dispersive properties of Co/C sliced multilayer gratings for the 4.4-5 nm wavelength interval</title>

Cited by 4 publications

References 0 publications

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Fabrication and characterization of sliced multilayer transmission grating for X-ray region

Structure of the core—cladding interface and radiation losses in hollow planar Bragg waveguides

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