<title>Excimer KrCl (223 nm) laser with the efficiency of 1.0% and 0.7 J output energy</title>

Efficient KrCl (223 nm) excimer laser based on TPI thyratron as a high-voltage switch

“…The comparative analysis of the laser pumping and radiation parameters with those obtained for excitation system based on a spark gap RU-65 as a high-voltage switch and described in [9] has been performed.…”

“…Additionally the system contains the automatic UV sparks preionization and low inductive discharge circuit including the peaking capacitor C 3 and the discharge gap. In accordance with [5][6][7][8][9] to obtain high value of the pump intensity in the excitation system used the inductance L=L 2 +L 5 of the main circuit was increased up to 100 nH by the increasing the inductance L 5 . The effect of this inductance on the pump intensity level was detail described in [5][6][7].…”

“…In the investigations we use the experimental setup described in our previous paper [9]. The electrical scheme of the excitation system with the element parameters is shown on the Figure 1.…”

“…In [8] the output energy of 300 mJ with total efficiency of 0.5% were obtained in He:Kr:HCl mixture at pumping intensity of 5.8-6.5 MW/cm 3 . For Ne:Kr:HCl mixture the output energy of 700 mJ with total efficiency of 1.0% was achieved at pumping intensity of 5.0-5.5 MW/cm 3 [9]. In both lasers the excitation system of the LC-inverter type with spark gap RU-65 as a high-voltage switch was used.…”

“…The optimal pumping conditions providing the maximal efficiency and output radiation energy for KrCl excimer laser with mixture based on He or Ne as a buffer gas were determined in our previous papers [8,9]. In [8] the output energy of 300 mJ with total efficiency of 0.5% were obtained in He:Kr:HCl mixture at pumping intensity of 5.8-6.5 MW/cm 3 .…”