&lt;title&gt;High-average power XeCl laser with x-ray preionization and spiker-sustainer excitation&lt;/title&gt;

Goor, F.A. van; Witteman, W.J.; Timmermans, John C.M.; Spijker, J. van; Couperus, Jacob

doi:10.1117/12.184594

Cited by 13 publications

(5 citation statements)

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“…Using X-ray preionization and a magnetically switched prepulse-mainpulse circuit, with a minimum self inductance of the peaking circuit, in accordance with previous successful developments on excimer lasers [4], [9], [12], we were able Manuscript received March 26, 1999;revised June 14, 1999. This work was supported by the Netherlands Technology Foundation STW.…”

Section: Introductionsupporting

confidence: 70%

“…In halogen containing laser gas mixtures, the discharge homogeneity deteriorates rapidly due to discharge filamentation and arc-formation as a consequence of dissociative electron attachment and the process of halogen depletion [6]- [8]. Therefore, long pulse discharge excited lasers usually operate with mixtures containing only small quantities of the active gases in several atmospheres of a buffer gas [9]- [11].…”

Section: Introductionmentioning

confidence: 99%

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A long pulse discharge excited ArF laser

Feenstra

Bastiaens

Peters

et al. 1999

IEEE J. Select. Topics Quantum Electron.

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An X-ray preionised, discharge excited ArF excimer laser, = 193 nm, has been studied in the long pulse regime. The laser performance is found to be primarily dependent on the discharge stability, and therefore, on the gas composition, preionization timing and the pumping power. Using X-ray preionization and prepulse-mainpulse excitation, laser pulselengths of up to 120-ns full-width at half-maximum at 4 mJ/`are obtained by decreasing the partial pressures of the active ingredients, F 2 and Ar, and using Ne as a buffergas. This is almost six times as long as usual for discharge excited ArF lasers.

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Section: Introductionsupporting

confidence: 70%

Section: Introductionmentioning

confidence: 99%

A long pulse discharge excited ArF laser

Feenstra

Bastiaens

Peters

et al. 1999

IEEE J. Select. Topics Quantum Electron.

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“…1 shows the crosssection of the laser head. The laser head is part of a wind tunnel (not shown) to allow high-repetition rate operation of the laser [4]. The resonator consisted of a 10 m radius concave total reflector and a flat 50% reflecting outcoupling mirror separated 120 cm.…”

Section: Experimental Configurationmentioning

confidence: 99%

The influence of charge-mode operation of a XeCl laser on the beam profile

Goor

Timmermans²,

Witteman

1996

Optics Communications

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The shape of the beam profile of a discharge excited XeCl excimer laser using a spiker-sustainer electrical circuit has been varied from a 'bell'-, through a 'top-hat'-, to a 'camel-back'-profile by varying the delay between the spiker pulse and the maincurrent with the circuit operating in the charge-mode. Fine-tuning of the beam profile can be done by varying the charging voltage of the main pulse forming network or the temperature of a gas purifier regulating the Xe and HCl partial pressures.

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“…For the application field of our 1 kHz, 1 kW long pulse XeCl excimer laser developed by the Nederlands Centrum voor Laser Research (NCLR) [1], the divergence of the optical beam is of utmost importance. The active medium of this laser has large discharge dimensions relative to the size of the fundamental gaussian mode of a stable plano-concave resonator.…”

Section: Introductionmentioning

confidence: 99%