&lt;title&gt;Interferometric length and roughness measurements with nanometer accuracy level&lt;/title&gt;

Титов, А. Н.; Malinovsky, Igor; Belaidi, Hakima; França, R S; Massone, C. A.

doi:10.1117/12.439212

SPIE Proceedings

2001

DOI: 10.1117/12.439212

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<title>Interferometric length and roughness measurements with nanometer accuracy level</title>

А. Н. Титов

Igor Malinovsky

Hakima Belaidi

et al.

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<title>Interferometric length and roughness measurements with nanometer accuracy level</title>

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References 8 publications

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