&lt;title&gt;Interferometric measurement for improved understanding of boundary effects in micromachined beams&lt;/title&gt;

Jensen, Brian D.; Bitsie, Fernando; Boer, Maarten P. de

doi:10.1117/12.360480

Cited by 25 publications

(19 citation statements)

References 9 publications

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“…where, Young's modulus ( 170 GPa for polysilicon [18]); spacing between the beam and the substrate; thickness of the polysilicon beams [13]. Details on the use of (1) and the numerical determination of the detachment length can be found elsewhere [9].…”

Section: Micromachine Test Resultsmentioning

confidence: 99%

Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlorosilane self-assembled monolayer

Ashurst

Yau

Carraro

et al. 2001

J. Microelectromech. Syst.

169

109

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This paper presents a quantitative comparison of the dichlorodimethylsilane (DDMS) monolayer to the octadecyltrichlorosilane (OTS) self-assembled monolayer (SAM) with respect to the film properties and their effectiveness as anti-stiction coatings for micromechanical structures. Both coatings have been evaluated in several ways, including atomic force microscopy (AFM), contact angle analysis (CAA), work of adhesion by cantilever beam array (CBA) technique and coefficient of static friction using a sidewall testing device. While water and hexadecane contact angles are comparable, the DDMS coated microstructures exhibit higher adhesion than OTS coated ones. Furthermore, coefficient of static friction data indicate that the DDMS films are not as effective at lubrication as the OTS SAM's are, although both exhibit much improvement over chemical oxide. However, AFM data show that the samples which receive DDMS treatment accumulate fewer particles during processing than those which receive the OTS SAM treatment. The thermal stability of the DDMS film in air far exceeds the OTS SAM, as the DDMS remains very hydrophobic to temperatures upwards of 400 C. [559]

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Section: Micromachine Test Resultsmentioning

confidence: 99%

Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlorosilane self-assembled monolayer

Ashurst

Yau

Carraro

et al. 2001

J. Microelectromech. Syst.

169

109

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“…In most micromachined cantilevers, the Young's modulus is not known a priori. Nonidealities such as nonzero , nonzero takeoff angle [19]- [23] [ Fig. 1(a)] and nonzero support post torsional compliance [ Fig.…”

mentioning

confidence: 99%

Interferometry of actuated microcantilevers to determine material properties and test structure nonidealities in MEMS

Jensen

Boer

Masters

et al. 2001

J. Microelectromech. Syst.

126

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By integrating interferometric deflection data from electrostatically actuated microcantilevers with a numerical finite difference model, we have developed a step-by-step procedure to determine values of Young's modulus while simultaneously quantifying nonidealities. The central concept in the methodology is that nonidealities affect the long-range deflections of the beams, which can be determined to near nanometer accuracy. Beam takeoff angle, curvature and support post compliance are systematically determined. Young's modulus is then the only unknown parameter, and is directly found. We find an average value of Young's modulus for polycrystalline silicon of 164.3 GPa and a standard deviation of 3.2 GPa (2%), reflecting data from three different support post designs. Systematic errors were assessed and may alter the average value by 5%. An independent estimate from grain orientation measurements yielded 163.4-164.4 GPa (the Voigt and Reuss bounds), in agreement with the step-by-step procedure. Other features of the test procedure include that it is rapid, nondestructive, verifiable and requires only a small area on the test chip. [619] Index Terms-Free-standing thin films, characterization, mechanical properties, statistical accuracy assessments. I. INTRODUCTION K NOWLEDGE of mechanical properties is critical to the design of MEMS. Nanoindentation [1] is commonly used to determine properties of thin films attached to a substrate, but substrate compliance and tip shape effects introduce considerable complexity into analysis methods (see, for example, [2] and references, therein). Free standing thin-film structures are Manuscript

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“…This is due to variations in the boundary conditions at the supporting edges. [30][31][32] This design shows a much lower stress levels in both the membrane and cantilever suspensions compared to the other designs discussed earlier.…”

Section: Type "C" Designmentioning

confidence: 82%

Novel InP-based optical MEMS device

Tay

Ramam

Gopal

2008

J. Micro/Nanolith. MEMS MOEMS

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We present a method for the design and fabrication of InPbased free-standing microelectromechanical systems structures, which include microcantilever beams and Fabry-Perot membranes. The membrane is designed to satisfy both mechanical and optical requirements for a wavelength division multiplexing device and micro-Raman spectroscopy technique is used to evaluate surface stresses. The membrane profile is measured using a white-light interferometry technique, and the effect of the structure geometry on residual stress formation is discussed. From the results obtained, we propose a novel filter design that shows minimum surface profile deviation and stresses.

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<title>Interferometric measurement for improved understanding of boundary effects in micromachined beams</title>

Cited by 25 publications

References 9 publications

Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlorosilane self-assembled monolayer

Dichlorodimethylsilane as an anti-stiction monolayer for MEMS: a comparison to the octadecyltrichlorosilane self-assembled monolayer

Interferometry of actuated microcantilevers to determine material properties and test structure nonidealities in MEMS

Novel InP-based optical MEMS device

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