&lt;title&gt;LIGA-fabricated two-dimensional quadrupole array and scroll pump for miniature gas chromatograph/mass spectrometer&lt;/title&gt;

Wiberg, Dean; Myung, Nosang V.; Eyre, Beverley; Shcheglov, Kirill; Orient, O. J.; Moore, Eric; Munz, Philip

doi:10.1117/12.520540

Cited by 17 publications

(15 citation statements)

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“…However, if the required linewidths are larger, in the tens of micrometers, imprinting/embossing techniques are highly amenable to full wafer processing. LIGA (lithography, galvano (electro) plating into resist mold, demolding) is yet another implementation of the above microfabrication techniques, and is suitable for metallic microstructures (e.g., micropumps (Wiberg et al, 2003)) as well as for fabrication of imprinting masters.…”

Section: Patterningmentioning

confidence: 99%

“…A Pirani pressure sensor for pressure measurements, in the high vacuum side was microfabricated in the same process (Doms, Bekesch, & Müller, 2005). A miniature scroll pump with a scroll height of 3 mm for vacuum pumping was made for a miniature quadrupole array (Wiberg et al, 2003). A computational analysis was performed to estimate the performance characteristics of the pump but no real experiments were done.…”

Section: E Other Parts (Detectors and Pumps)mentioning

confidence: 99%

“…Another miniaturized quadrupole system, a 3 Â 3 array of hyperboloid quadrupole mass filters with a 3-mm pole length, was fabricated by exposing a photoresist to synchrotron radiation and filling the resulting molds (PMMA) with nickel by electroplating (Wiberg et al, 2003). Electrical connectivity and spatial orientation were established by bonding the pole array to a low temperature co-fired ceramic (LTCC) substrate.…”

Section: B Quadrupolesmentioning

confidence: 99%

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Microchip technology in mass spectrometry

Sikanen

Franssila

Kauppila

et al. 2009

Mass Spectrom. Rev.

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Microfabrication of analytical devices is currently of growing interest and many microfabricated instruments have also entered the field of mass spectrometry (MS). Various (atmospheric pressure) ion sources as well as mass analyzers have been developed exploiting microfabrication techniques. The most common approach thus far has been the miniaturization of the electrospray ion source and its integration with various separation and sampling units. Other ionization techniques, mainly atmospheric pressure chemical ionization and photoionization, have also been subject to miniaturization, though they have not attracted as much attention. Likewise, all common types of mass analyzers have been realized by microfabrication and, in most cases, successfully applied to MS analysis in conjunction with on-chip ionization. This review summarizes the latest achievements in the field of microfabricated ion sources and mass analyzers. Representative applications are reviewed focusing on the development of fully microfabricated systems where ion sources or analyzers are integrated with microfluidic separation devices or microfabricated pums and detectors, respectively. Also the main microfabrication methods, with their possibilities and constraints, are briefly discussed together with the most commonly used materials.

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Section: Patterningmentioning

confidence: 99%

Section: E Other Parts (Detectors and Pumps)mentioning

confidence: 99%

Section: B Quadrupolesmentioning

confidence: 99%

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Microchip technology in mass spectrometry

Sikanen

Franssila

Kauppila

et al. 2009

Mass Spectrom. Rev.

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“…Ion source MEMS miniaturization has also advanced with realization of a carbon nanotube electron impact ion source [16]. Finally, some rapid prototyping techniques have also been used for miniaturization of mass analyzers, including an ultraviolet-LIGA process for fabricating two-dimensional (2D) QMF arrays [17] and stereolithography (SLA) for fabricating rectilinear ion traps [18]. An attractive goal for most of the previously mentioned miniaturization methods is a reliable and fully integrated mass spectrometer with all of its components built using the same process.…”

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confidence: 99%

Development of quadrupole mass spectrometers using rapid prototyping technology

Brkić

France

Clare

et al. 2009

J. Am. Soc. Mass Spectrom.

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In this report, we present a prototype design of a quadrupole mass filter (QMF) with hyperbolic electrodes, fabricated at the University of Liverpool using digital light processing (DLP), a low-cost and lightweight 3D rapid prototyping (RP) technique. Experimental mass spectra are shown for H 2 ϩ , D 2 ϩ , and He ϩ ions to provide proof of principle that the DLP mass filter is working as a mass analyzer in the low-mass range (1 to 10 amu). The performance of the DLP QMF has also been investigated for individual spectral peaks. Numerical simulations of the instrument were performed by coupling CPO and Liverpool QMS-2 programs to model both the ion source and mass filter, respectively, and the instrument is shown to perform as predicted by theory. DLP thus allows miniaturization of mass spectrometers at low cost, using hyperbolic (or other) geometries of mass analyzer electrodes that provide optimal ion manipulation and resolution for a given application. The potential of using RP fabrication techniques for developing miniature and microscale mass analyzers is also discussed. (J Am Soc Mass Spectrom 2009, 20, 1359 -1365

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“…Silicon-based microelectromechanical systems (MEMS) design approaches are ideally suited to the solution of these problems, as techniques for fabricating complex, multi-layer structures with micrometer precision are well-advanced. Quadrupoles [5,6,[15][16][17] and traps [18,19] have been constructed using MEMS technology, with varying degrees of success.…”

mentioning

confidence: 99%

Comparison of ion coupling strategies for a microengineered quadrupole mass filter

Wright¹,

Syms

O'Prey³

et al. 2009

J. Am. Soc. Mass Spectrom.

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The limitations of conventional machining and assembly techniques require that designs for quadrupole mass analyzers with rod diameters less than a millimeter are not merely scale versions of larger instruments. We show how silicon planar processing techniques and microelectromechanical systems (MEMS) design concepts can be used to incorporate complex features into the construction of a miniature quadrupole mass filter chip that could not easily be achieved using other microengineering approaches. Three designs for the entrance and exit to the filter consistent with the chosen materials and techniques have been evaluated. The differences between these seemingly similar structures have a significant effect on the performance. Although one of the designs results in severe attenuation of transmission with increasing mass, the other two can be scanned to m/z ϭ 400 without any corruption of the mass spectrum. At m/z ϭ 219, the variation in the transmission of the three designs was found to be approximately four orders of magnitude. A maximum resolution of M/⌬M ϭ 87 at 10% peak height has been achieved at m/z ϭ 219 with a filter operated at 6 MHz and constructed using rods measuring ( nterest in the miniaturization of mass analyzers has been growing rapidly in recent years, largely driven by the need for compact, lightweight systems for use in environmental, security, and space applications. While there have been numerous attempts to make small analyzers, not all can reasonably be called miniature [1]. However, quadrupole mass filters [2-6] and various types of ion traps [7][8][9] with characteristic dimensions of the order of a few millimeters or less have been demonstrated. The size and weight contribution to a complete mass spectrometer system is not the only benefit of a miniaturized quadrupole mass filter. The rf amplitude required to achieve a particular mass range increases with the square of the rod radius. Hence, the rf supplies for miniature filters can be smaller and require less power than those needed for larger filters. More importantly, smaller pumps may be used, as the short path length of ions in the filter means that a higher pressure can be tolerated. Although this paper is focused on miniaturization of the filter, reports on the development of other miniaturized components that might be incorporated into a system, such as ion sources, gauges, and pumps can be found elsewhere [10 -12].The factors that determine the size of a miniature quadrupole mass filter are the required signal level, the accuracy of the construction technique, and the number of rf cycles needed to achieve the desired resolution. Clearly, as the size of the entrance aperture decreases, there will be an inevitable loss of signal, although some of this can be recovered through the use of an array [2,4]. There is a well-known correlation [13] between the fractional geometrical error and ultimate resolution. Hence, one fundamental limitation is set by the accuracy of the fabrication technique and the minimum acceptable resolution. Si...

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<title>LIGA-fabricated two-dimensional quadrupole array and scroll pump for miniature gas chromatograph/mass spectrometer</title>

Cited by 17 publications

References 0 publications

Microchip technology in mass spectrometry

Microchip technology in mass spectrometry

Development of quadrupole mass spectrometers using rapid prototyping technology

Comparison of ion coupling strategies for a microengineered quadrupole mass filter

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