&lt;title&gt;Micromachining inertial instruments&lt;/title&gt;

Weinberg, Marc S.; Bernstein, J.; Borenstein, Jeffrey T.; Campbell, J.; Cousens, J.; Cunningham, Robert K.; Fields, Robert S.; Greiff, Paul; Hugh, Brenda; Niles, L.; Sohn, Jerome B.

doi:10.1117/12.251201

Cited by 20 publications

(11 citation statements)

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“…Precision micromachining, robust vacuum packaging, and high-performance interface circuit and electronic tuning techniques are required to reduce the production cost to a level that is acceptable for the large-volume automotive market [132]. Since 1993, Draper and Rockwell International have been collaborating to commercialize Draper's silicon tuningfork gyroscope targeted for automotive applications [133]. Other companies like General Motors, Analog Devices, and Samsung have also performed extensive research and development on various gyroscope structures, and prototypes have been demonstrated [132].…”

Section: Commercialization and Future Trendsmentioning

confidence: 99%

Micromachined inertial sensors

1998

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This paper presents a review of silicon micromachined accelerometers and gyroscopes. Following a brief introduction to their operating principles and specifications, various device structures, fabrication technologies, device designs, packaging, and interface electronics issues, along with the present status in the commercialization of micromachined inertial sensors, are discussed. Inertial sensors have seen a steady improvement in their performance, and today, microaccelerometers can resolve accelerations in the micro-g range, while the performance of gyroscopes has improved by a factor of 102 2 2 every two years during the past eight years. This impressive drive to higher performance, lower cost, greater functionality, higher levels of integration, and higher volume will continue as new fabrication, circuit, and packaging techniques are developed to meet the ever increasing demand for inertial sensors.

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Section: Commercialization and Future Trendsmentioning

confidence: 99%

Micromachined inertial sensors

1998

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“…MEMS (Microelectromechanical systems) accelerometers have the advantages of small size, light weight, low power consumption and low cost [ 1 ]; thus, they are widely used in the fields of inertial navigation, medical consumer electronics and automotives [ 2 , 3 ]. Among various kinds of MEMS accelerometers, silicon resonant accelerometers are promising for high sensitivity, large linear range, low bias instability and so on [ 4 , 5 , 6 , 7 ].…”

Section: Introductionmentioning

confidence: 99%

A Novel Self-Temperature Compensation Method for Mode-Localized Accelerometers

et al. 2022

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Mode-localized sensing paradigms applied to accelerometers have recently become popular research subjects. However, the output of mode-localized accelerometers is influenced by environment temperature due to the difference in the thermal properties of the coupling resonators and the temperature dependence of coupling stiffness. To improve the performance of mode-localized accelerometers against temperature, we proposed an in situ self-temperature compensation method by utilizing the resonant frequency besides of amplitude ratios, which can be implied online. Experimental results showed that there were nearly 79-times and 87-times improvement in zeros bias and scale factor, respectively.

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“…Microelectromechanical systems (MEMS) accelerometers have been widely used in many applications, such as mobile devices, gaming, automobile and healthcare [ 1 , 2 ] for its advantages of small volume, light weight, low power consumption and low cost [ 3 ]. However, MEMS accelerometers still need further development for high precision applications, such as inertial navigation, tilt measurement and geophysical measurements [ 4 , 5 , 6 , 7 , 8 , 9 ].…”

Section: Introductionmentioning

confidence: 99%

An Improved Difference Temperature Compensation Method for MEMS Resonant Accelerometers

et al. 2021

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Resonant accelerometers are promising because of their wide dynamic range and long-term stability. With quasi-digital frequency output, the outputs of resonant accelerometers are less vulnerable to the noise from circuits and ambience. Differential structure is usually adopted in a resonant accelerometer to achieve higher sensitivity to acceleration and to reduce common noise at the same time. Ideally, a resonant accelerometer is only sensitive to external acceleration. However, temperature has a great impact on resonant accelerometers, causing unexcepted frequency drift. In order to cancel out the frequency drift caused by temperature change, an improved temperature compensation method for differential vibrating accelerometers without additional temperature sensors is presented in this paper. Experiment results demonstrate that the temperature sensitivity of the prototype sensor is reduced from 43.16 ppm/°C to 0.83 ppm/°C within the temperature range of −10 °C to 70 °C using the proposed method.

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<title>Micromachining inertial instruments</title>

Cited by 20 publications

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Micromachined inertial sensors

Micromachined inertial sensors

A Novel Self-Temperature Compensation Method for Mode-Localized Accelerometers

An Improved Difference Temperature Compensation Method for MEMS Resonant Accelerometers

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