&lt;title&gt;Modification of the Koster interferometer for automatization of gauge block measurements&lt;/title&gt;

Sałbut, Leszek; Kujawińska, Małgorzata; Ramotowski, Zbigniew

doi:10.1117/12.323099

Cited by 4 publications

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“…It can be made using a Birge ratio test which compares the observed spread of the results with spread expected from individual uncertainties. The Birge ratio can be calculated as in (7). …”

Section: Tests Of the Systemmentioning

confidence: 99%

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Measurement System Based on Multi-Wavelength Interferometry for Long Gauge Block Calibration

Wengierow¹,

Sałbut²,

Ramotowski³

et al. 2013

Metrology and Measurement Systems

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This paper shows the result of work of the Institute of Micromechanics and Photonics at Warsaw University of Technology and the Length and Angle Division of Central Office of Measures (GUM) [1] in building an automatic multiwavelength interferometric system with extended measurement range for calibration of long (up to 1 m) gauge blocks. The design of a full working setup with environmental condition control and monitoring systems, as well as image analysis software, is presented. For length deviation determination the phase fraction approach is proposed and described. To confirm that the system is capable of calibrating gauge blocks with assumed accuracy, a comparison between the results of 300 mm length gauge block measurement obtained by using other systems from the Central Office of Measures is made. Statistical analysis proved that the system can be used for high precision measurements with assumed standard uncertainty (125 nm for a length of 1 m). Finally the comparison between our results obtained for a long gauge block set (600 mm to 1000 mm long) and previous calibrations made by the Physikalisch-Technische Bundesanstalt (PTB) [2] is shown.

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“…It can be made using a Birge ratio test which compares the observed spread of the results with spread expected from individual uncertainties. The Birge ratio can be calculated as in (7). …”

Section: Tests Of the Systemmentioning

confidence: 99%

“…[5]. Some later interferometers using the exact fractions method were modernized using the phase-stepping system for more accurate fringe fraction determination [6][7] while others are designed as systems with no wringing on the base plate [8][9].…”

Section: Introductionmentioning

confidence: 99%

Measurement System Based on Multi-Wavelength Interferometry for Long Gauge Block Calibration

Wengierow¹,

Sałbut²,

Ramotowski³

et al. 2013

Metrology and Measurement Systems

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“…To determine global phase correction using the stack method, a GBI 300 interferometer with laser light at 633 nm and 543 nm, manufactured by Hexagon (NPL-Brown & Sharp, see figure 5) and a Kösters interferometer with a cadmium lamp emitting light at 468, 480, 509 and 644 nm wavelengths (figure 6), were used. Both the GBI 300 interferometer and the modernized Kösters interferometer [13] use the temporal phase shifting method for fringe pattern analysis.…”

Section: Instruments Used In the Measurementsmentioning

confidence: 99%

Practical aspects of phase correction determination for gauge blocks measured by optical interferometry

Ramotowski¹,

Sałbut²

2012

Meas. Sci. Technol.

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Determination of a phase correction is necessary when making interferometric measurements of gauge blocks with an auxiliary platen. The phase correction compensates for the differences in the reflecting properties of the gauge block and the platen surfaces. Different phase corrections are reported for gauge blocks of different manufacturers, made from different materials and with different surface roughness compared to the platen. In this paper, the process of selection of the best surface roughness parameter and the influence of different complex refractive indices of the same type of material are analysed. The new surface roughness parameter based on the difference between the weighted mean of maximum and minimum asperities of 3D surface roughness measured by a modernized Linnik phase shifting interferometer is introduced. The results of comparison of the phase correction values calculated from the difference between the weighted mean values and calculated from stack method measurements are presented and discussed. The complementary method of phase correction measurement based on the cross-wringing method with the use of the modernized phase shifting Kösters interferometer is proposed.

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“…Most of the automatic or semi-automatic gauge block interferometers described in the literature use a phase stepping method to determine the fringe fraction [6][7][8]. These authors give standard uncertainties in fringe fraction determination ranging from 0.02 to 0.004 of a fringe.…”

Section: Automating Fringe Analysismentioning

confidence: 99%

Automation of a 1960s Hilger gauge block interferometer

2003

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This paper describes improvements to a Hilger gauge block interferometer, including a fibre optic feed for a traceable laser radiation, use of a CCD camera for computer-controlled acquisition of fringe images and automatic analysis of the fringe image to obtain the fringe fraction. The gauge measuring process is now automated, computer-controlled, more accurate and significantly faster and easier to operate than the original design.

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<title>Modification of the Koster interferometer for automatization of gauge block measurements</title>

Cited by 4 publications

References 0 publications

Measurement System Based on Multi-Wavelength Interferometry for Long Gauge Block Calibration

Measurement System Based on Multi-Wavelength Interferometry for Long Gauge Block Calibration

Practical aspects of phase correction determination for gauge blocks measured by optical interferometry

Automation of a 1960s Hilger gauge block interferometer

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