&lt;title&gt;Novel approaches to generate aspherical optical surfaces&lt;/title&gt;

Faehnle, Oliver; Brug, Hedser H. van

doi:10.1117/12.369181

Cited by 14 publications

(8 citation statements)

References 5 publications

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“…Subsurface damage, arising in the scope of 1 ~ 100μm below the surface of brittle materials generally, refers to the fracture, deformation, contamination and other internal defects generated during the machining process. Subsurface damage mainly focuses on the defect layer and deformation layer, and the defect layer contains scratches and micro cracks [4]. The subsurface damage can decrease optical materials' strength and change their optical properties.…”

Section: Introductionmentioning

confidence: 99%

“…In terms of technology, the high-precision optical components refer to the ultra-precision machining, precision detection technology, optical and semiconductor field. The high-precision optical components relates to the energy, space and defense equipment, integrated circuits and MEMS and other high-end fields in the aspect of application [4].…”

Section: Introductionmentioning

confidence: 99%

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The influence of grinding process parameters on transmittance and absorbance of the optical components

Wang

Chen

et al. 2015

2015 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3m-Nano)

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The surface roughness and the subsurface damage introduced by manufacturing procedures are important factors affecting the mechanical and optical properties of the optical components. To obtain the relationships between the subsurface damage parameters and optical properties, we study on the influence of grinding process parameters (average abrasive size, grinding force, wheel speed, grinding depth) on the optical properties of high-precision optical components, such as transmittance and absorbance. Results indicate that with the increase of average abrasive size, grinding force or grinding depth, the transmittance of high-precision optical components decreases and the absorbance increases. However, as the wheel speed increases, the transmittance of high-precision optical components increases and the absorbance of high-precision optical components decreases. This work provides a foundation for revealing how the subsurface damage influences on the optical properties and is also useful to probe into the mechanism of damage induced by laser for the high-precision optical components.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

The influence of grinding process parameters on transmittance and absorbance of the optical components

Wang

Chen

et al. 2015

2015 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3m-Nano)

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“…5 The properties of the optical component have a significant impact on the direction of propagation, the intensity and the polarization state of light rays. 6 The fabrication techniques are selected carefully to create an ultrasmooth surface without any surface or subsurface damage (SSD) to maintain the desirable properties as well as to improve the performance of optical components. 6, 7 SSD has a detrimental effect on the stability of the optical system and image quality.…”

Section: Introductionmentioning

confidence: 99%

Review of several precision finishing processes for optics manufacturing

Ghosh

Sidpara

Bandyopadhyay

2018

Journal of Micromanufacturing

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The ultrasmooth optical components with atomic-order surface roughness and nanometre-level shape accuracy are in immense demand with the rapid advancement of modern optical technology. In recent years, aspherical and free-form surfaces are gaining more interest for its favorable properties. Moreover, the new optical materials with immensely enhanced mechanical properties are being developed to meet the stringent requirements of modern optics. Fabrication of complex-shaped ultrasmooth optical components becomes a significant challenge as conventional finishing techniques are unable to machine aspherical or free-form surfaces precisely. This situation demands some highly deterministic finishing processes. Mostly, the optical components are fabricated by shaping or pre-finishing methods followed by final finishing processes. In the shaping or pre-finishing methods, the rigid abrasive tools are used to remove the material at an enhanced rate and near net shape of the elements can be attained. Surface finish and shape accuracy can also be improved to some extent. Owing to the presence of residual finishing marks generated by shaping methods, the application of the components is limited to the infrared (IR) optics. Final finishing processes include more deterministic and flexible polishing techniques that can achieve desired surface finish, figure accuracy and surface integrity to make it suitable for shorter wavelength applications. In recent years, single point diamond turning, precision grinding, plasma chemical vaporization machining and magnetorheological fluid-based finishing are widely used for fabricating ultrasmooth optics. In this article, principle, mechanism of material removal and applicability of the aforementioned precision finishing processes to different materials are discussed.

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“…Subsurface damage (SSD) of optical components made of the optical brittle materials introduced during machining process affects the long-term stability of the optical system, image quality, anti-laser damage threshold, and other important performance indexes seriously and even leads to system failure [1]. Highprecision optical components are involved in many fields, such as ultra-precision machining, precision detection technology, optics, and semiconductors, so their processing quality should be required strictly and their technological design and parameter selection during machining process should be reasonable in order to ensure the surface integrity of highprecision optical components.…”

Section: Introductionmentioning

confidence: 99%

Relationship between grinding process and the parameters of subsurface damage based on the image processing

Wang

Hong-feng

et al. 2015

Int J Adv Manuf Technol

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Grinding is the main process step for the highprecision optical components, and its process parameters may bring forth subsurface damage to some degrees on the surfaces and finally result in the variation of the mechanical and optical properties of the components. In this paper, the ground sample is etched to expose the micro cracks and the characterization parameters of the subsurface damage are extracted using the image processing method. To investigate the influence of main grinding parameters on the micro cracks of subsurface damage, relationships among the average abrasive size, grinding force, wheel speed, and grinding depth and characterization parameters (length, angle, and density) of micro cracks are established. The results show that the influence of grinding parameters on the micro crack's length is consistent with that on the surface roughness. The average abrasive size and grinding force have obvious influence on the subsurface damage and surface roughness than wheel speed and grinding depth. Micro cracks' angle and density are almost not affected by the grinding parameters.

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<title>Novel approaches to generate aspherical optical surfaces</title>

Cited by 14 publications

References 5 publications

The influence of grinding process parameters on transmittance and absorbance of the optical components

The influence of grinding process parameters on transmittance and absorbance of the optical components

Review of several precision finishing processes for optics manufacturing

Relationship between grinding process and the parameters of subsurface damage based on the image processing

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