&lt;title&gt;Performance of MEMS-based gas distribution and control systems for semiconductor processing&lt;/title&gt;

Henning, Alex; Fitch, John; Harris, James M.; Arkilic, Errol; Cozad, Brad A.; Dehan, Ben

doi:10.1117/12.323883

Cited by 4 publications

(1 citation statement)

References 8 publications

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“…Although the scientific community has recently witnessed several 3-D component designs [10][11][12] , the majority of devices were fabricated with silicon and related materials using complicated and time-consuming processes. Moreover, the wet etching of single-crystal silicon is geometrically limited by the crystallographic planes.…”

Section: Multilayer Microfluidic Polymer Chipsmentioning

confidence: 99%

Laser bonding of multilayer polymer microfluidic chips

Lai

Yuan

et al. 2005

SPIE Proceedings

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Polymer microfluidic chips have stimulated great instrests in the field of biochemical and medical analysis due to their low prices, easy fabrication and biocompatibility. Recently multilayer microfluidic chips have been fabricated by adhesive bonding to form 3-D multilayer laminate. However adhesive bonding may introduce pollution as well as complexity in coating. A bonding system with compact diode laser is introduced and a novel bonding method for multilayer microfluidic chips is developed. This bonding method is based on transmission laser microwelding technique. In this method, a special colorless dye as laser absorber, thus transparent polymer sheets can be stacked and bonded layer by layer. Initial results and bonding performance are given.

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Section: Multilayer Microfluidic Polymer Chipsmentioning

confidence: 99%

Laser bonding of multilayer polymer microfluidic chips

Lai

Yuan

et al. 2005

SPIE Proceedings

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Microfluidic proportional flow controller

Prentice-Mott¹,

Toner²,

Irimia³

2010

J. Micromech. Microeng.

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Precise flow control in microfluidic chips is important for many biochemical assays and experiments at microscale. While several technologies for controlling fluid flow have been implemented either on- or off-chip, these can provide either high-speed or high-precision control, but seldom could accomplish both at the same time. Here we describe a new on-chip, pneumatically activated flow controller that allows for fast and precise control of the flow rate through a microfluidic channel. Experimental results show that the new proportional flow controllers exhibited a response time of approximately 250 ms, while our numerical simulations suggest that faster actuation down to approximately 50 ms could be achieved with alternative actuation schemes.

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