&lt;title&gt;Phase correction in measurement of gauge blocks using a new double-ended interferometer&lt;/title&gt;

Ishii, Yasushi

doi:10.1117/12.323106

Cited by 6 publications

(4 citation statements)

References 4 publications

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“…Leach [8] and Bönsch [9] presented methods of measuring roughness correction based on the measurement of total integrated scatter, while Stoup [10] suggested a spherical contact technique to minimize the errors caused by flatness deviation. Validation of Thwaite's method using a doubleended interferometer and both AFM and stylus instrument methods for surface profile measurements was presented by Ishii [11]. Several experiments regarding phase shift on ceramic gauge blocks, including the cross-wringing method, surface roughness measurements and using the stack method, were presented by Shutoh [12].…”

Section: Methods Of Determining Global Phase Correction Based On Lite...mentioning

confidence: 99%

Practical aspects of phase correction determination for gauge blocks measured by optical interferometry

Ramotowski¹,

Sałbut²

2012

Meas. Sci. Technol.

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Determination of a phase correction is necessary when making interferometric measurements of gauge blocks with an auxiliary platen. The phase correction compensates for the differences in the reflecting properties of the gauge block and the platen surfaces. Different phase corrections are reported for gauge blocks of different manufacturers, made from different materials and with different surface roughness compared to the platen. In this paper, the process of selection of the best surface roughness parameter and the influence of different complex refractive indices of the same type of material are analysed. The new surface roughness parameter based on the difference between the weighted mean of maximum and minimum asperities of 3D surface roughness measured by a modernized Linnik phase shifting interferometer is introduced. The results of comparison of the phase correction values calculated from the difference between the weighted mean values and calculated from stack method measurements are presented and discussed. The complementary method of phase correction measurement based on the cross-wringing method with the use of the modernized phase shifting Kösters interferometer is proposed.

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Section: Methods Of Determining Global Phase Correction Based On Lite...mentioning

confidence: 99%

Practical aspects of phase correction determination for gauge blocks measured by optical interferometry

Ramotowski¹,

Sałbut²

2012

Meas. Sci. Technol.

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“…For determining the correction for the phase change in reflection, including for both material bulk optical properties and surface roughness, there are several common methods. One method uses literature values for the refractive index of the material and measures surface roughness with a stylus instrument or AFM, with application of Thwaite's [3,6] method. Another option is to use an integrating sphere for phase change due to surface roughness [8,22], and if needed-i.e.…”

Section: Phase Change In Reflectionmentioning

confidence: 99%

“…However, PTB, the NMI in Germany, is planning to build a high accuracy DEI for special applications [2]. Some other laboratories have published research related to doubleended interferometry: Ishii [3,4] used atomic force microscopy (AFM) for surface roughness correction evaluation; Kuriyama [5] used Thwaite's [6] method for phase change correction and claims extremely low uncertainty; and Buchta et al have developed a new version of the Dowell instrument with white light interference for approximate length determination [7]. To date there has been little emphasis on wavefront errors.…”

Section: Introductionmentioning

confidence: 99%

Wave front and phase correction for double-ended gauge block interferometry

Lassila¹,

Byman²

2015

Metrologia

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Double-ended interferometry has several benefits over single-ended gauge block interferometry: there is no need for wringing, which wears surfaces and requires expertise, and there is improved repeatability, since there is no variation due to inconsistent wringing conditions or form errors of the gauge block surfaces. Some disadvantages of double-ended interferometry are that absolute phase change correction is needed for the gauge block and its uncertainty has a double effect on total uncertainty. In addition, elimination of the wavefront error is more complicated than with single-ended interferometry. A simple optical modification that enables double-ended interferometer (DEI) measurements with the MIKES interferometer for long gauge blocks is presented. This modification is applicable to almost any single-ended interferometer (SEI). A procedure for evaluating the wave front correction for different parts of the interferogram of DEI is explained, and a modification and software with capability for nine-point phase stepping is presented. Three independent methods for evaluation of the phase correction were studied. One of them uses integrating sphere for the surface roughness correction and literature values for the phase change due to complex refractive index of material correction. The second evaluates the phase correction from the difference between DEI and SEI results obtained with a quartz platen. The third uses differences-from separate measurements-between the results obtained with quartz or steel auxiliary platens. Only a few gauge blocks per set need testing to obtain phase correction. SEI and DEI results with different phase correction determination methods are presented and evaluated. The uncertainty 2 9 2 .

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“…A number of studies on DEIs by various authors on different setups mainly concern the effects of phase changes and roughness corrections [17,18] or wavefront corrections [12]. The first two effects can be summarized as surface effects of the gauge block.…”

Section: Introductionmentioning

confidence: 99%

Investigation of the uncertainty contributions of the alignment of PTB’s double-ended interferometer by virtual experiments

et al. 2021

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High-accuracy length measurements of prismatic bodies (e.g. gauge blocks) are usually performed by means of single-ended interferometers. To perform these measurements, the gauge block must be wrung to a reference plate. The quality of contact affects the measured length and also the wringing process wears down or damages the measuring faces. Furthermore, it limits the use of such interferometers to bodies that are suitable for wringing. PTB’s double-ended interferometer allows high-accuracy length measurements that are traceable to the International System of Units to be performed without a reference plate. However, because the setup of this interferometer is complex and additional optical components are required the alignment process is challenging. Compliance with the defined gauge-block length in ISO 3650 is also challenging, especially for non-perfect shaped gauge blocks. In this work, we develop a precise alignment method for the double-ended interferometer and systematically study the contributions of misalignments to the uncertainty of the measured length. In order to explore the accuracy of the developed procedure and to estimate the size of the uncertainty caused by deviations from perfect gauge block shapes, virtual experiments are carried out using the PTB library SimOptDevice. The virtual experiment is validated by a comparison to experimental data. In addition, theoretical relations are confirmed. Finally, Monte Carlo runs of the virtual experiment are performed to quantitatively explore the size of different sources of uncertainty on the developed alignment method. The results suggest that the developed alignment method is highly accurate and is expected to yield an uncertainty contribution to the final length measurement in the sub-nanometer range.

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<title>Phase correction in measurement of gauge blocks using a new double-ended interferometer</title>

Cited by 6 publications

References 4 publications

Practical aspects of phase correction determination for gauge blocks measured by optical interferometry

Practical aspects of phase correction determination for gauge blocks measured by optical interferometry

Wave front and phase correction for double-ended gauge block interferometry

Investigation of the uncertainty contributions of the alignment of PTB’s double-ended interferometer by virtual experiments

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