&lt;title&gt;Phase shift on ceramic gauge blocks&lt;/title&gt;

Shutoh, Shunji; Moriyama, Hirofumi; Sawabe, Masaji

doi:10.1117/12.323107

Cited by 4 publications

(5 citation statements)

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“…For example, the pack experiment also accounts for the comparison between measuring the gauge block wrung to the platen surface and measuring the block wrung to another gauge block of similar material and surface finish as it is nested in the pack. The optical phase-change correction can be evaluated by other methods, in which case a separate correction for surface roughness effects is also included in the gauge block calibration result [15][16][17][18]. It is emphasized that for a reliable evaluation of the phase-change correction from pack experiments, the geometry and especially wringing of the blocks making up the pack must be of superior quality in order to minimize measurement variance.…”

Section: Corrections For Phase Change On Reflectionmentioning

confidence: 99%

NORAMET comparison of gauge block measurement by optical interferometry

Decker¹,

Lapointe²,

Stoup³

et al. 1999

Metrologia

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A varied assortment of forty-seven new and used steel, ceramic, chromium carbide and tungsten carbide gauge blocks from nine manufacturers, ranging in length from 0.5 mm to 101.6 mm, were calibrated by four laboratories from the NORAMET countries using the method of optical interferometry. Measurements of central length of the gauge blocks are compared. The data are utilized as a test bed to illustrate the outcome of two different techniques with potential for application in comparisons of the calibration services of national metrology institutes (NMIs).

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Section: Corrections For Phase Change On Reflectionmentioning

confidence: 99%

NORAMET comparison of gauge block measurement by optical interferometry

Decker¹,

Lapointe²,

Stoup³

et al. 1999

Metrologia

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“…Validation of Thwaite's method using a doubleended interferometer and both AFM and stylus instrument methods for surface profile measurements was presented by Ishii [11]. Several experiments regarding phase shift on ceramic gauge blocks, including the cross-wringing method, surface roughness measurements and using the stack method, were presented by Shutoh [12].…”

Section: Methods Of Determining Global Phase Correction Based On Lite...mentioning

confidence: 99%

Practical aspects of phase correction determination for gauge blocks measured by optical interferometry

Ramotowski¹,

Sałbut²

2012

Meas. Sci. Technol.

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Determination of a phase correction is necessary when making interferometric measurements of gauge blocks with an auxiliary platen. The phase correction compensates for the differences in the reflecting properties of the gauge block and the platen surfaces. Different phase corrections are reported for gauge blocks of different manufacturers, made from different materials and with different surface roughness compared to the platen. In this paper, the process of selection of the best surface roughness parameter and the influence of different complex refractive indices of the same type of material are analysed. The new surface roughness parameter based on the difference between the weighted mean of maximum and minimum asperities of 3D surface roughness measured by a modernized Linnik phase shifting interferometer is introduced. The results of comparison of the phase correction values calculated from the difference between the weighted mean values and calculated from stack method measurements are presented and discussed. The complementary method of phase correction measurement based on the cross-wringing method with the use of the modernized phase shifting Kösters interferometer is proposed.

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“…literature values for bulk material properties. Another approach sometimes mentioned is the cross method [23,24]; here the GBs are wrung to each other to form a cross, and the measured length is compared to that when wrung to a reference platen. NIST uses its own spherical contact method [25].…”

Section: Phase Change In Reflectionmentioning

confidence: 99%

Wave front and phase correction for double-ended gauge block interferometry

Lassila¹,

Byman²

2015

Metrologia

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Double-ended interferometry has several benefits over single-ended gauge block interferometry: there is no need for wringing, which wears surfaces and requires expertise, and there is improved repeatability, since there is no variation due to inconsistent wringing conditions or form errors of the gauge block surfaces. Some disadvantages of double-ended interferometry are that absolute phase change correction is needed for the gauge block and its uncertainty has a double effect on total uncertainty. In addition, elimination of the wavefront error is more complicated than with single-ended interferometry. A simple optical modification that enables double-ended interferometer (DEI) measurements with the MIKES interferometer for long gauge blocks is presented. This modification is applicable to almost any single-ended interferometer (SEI). A procedure for evaluating the wave front correction for different parts of the interferogram of DEI is explained, and a modification and software with capability for nine-point phase stepping is presented. Three independent methods for evaluation of the phase correction were studied. One of them uses integrating sphere for the surface roughness correction and literature values for the phase change due to complex refractive index of material correction. The second evaluates the phase correction from the difference between DEI and SEI results obtained with a quartz platen. The third uses differences-from separate measurements-between the results obtained with quartz or steel auxiliary platens. Only a few gauge blocks per set need testing to obtain phase correction. SEI and DEI results with different phase correction determination methods are presented and evaluated. The uncertainty 2 9 2 .

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<title>Phase shift on ceramic gauge blocks</title>

Cited by 4 publications

References 0 publications

NORAMET comparison of gauge block measurement by optical interferometry

NORAMET comparison of gauge block measurement by optical interferometry

Practical aspects of phase correction determination for gauge blocks measured by optical interferometry

Wave front and phase correction for double-ended gauge block interferometry

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