Abstract:For many areas of acoustics, standards organizations or regulatory bodies have mandated vibration or noise criteria and defined the appropriate processing methods. No such standards exist for vibration-sensitive facilities at this time except as defined by equipment manufacturers, facility owners, and/or vibration consultants. The existing criteria from these groups differ widely in form. This paper reviews the various candidate methods offered by current technology for processing measured vibration data.
“…12 In a very common form of proportional bandwidth analysis, each bandwidth is 23% (i.e., one-third octave) of the center frequency and three adjacent bands represent an octave. The center frequencies are given by established standards (e.g., DIN EN ISO 266): starting from f 0 = 1000 Hz, the lower center frequencies f n1 is recursively defined as f n−1 = f n /2 high n = f n · 2 1 6 , respectively.…”
Section: Appendix: One-third Octave Representation Of Vibrationsmentioning
The construction and the vibrational performance of a low vibration laboratory for microscopy applications comprising a 100 ton floating foundation supported by passive pneumatic isolators (air springs), which rest themselves on a 200 ton solid base plate, are discussed. The optimization of the air spring system leads to a vibration level on the floating floor below that induced by an acceleration of 10 ng for most frequencies. Additional acoustic and electromagnetic isolation is accomplished by a room-in-room concept.
“…12 In a very common form of proportional bandwidth analysis, each bandwidth is 23% (i.e., one-third octave) of the center frequency and three adjacent bands represent an octave. The center frequencies are given by established standards (e.g., DIN EN ISO 266): starting from f 0 = 1000 Hz, the lower center frequencies f n1 is recursively defined as f n−1 = f n /2 high n = f n · 2 1 6 , respectively.…”
Section: Appendix: One-third Octave Representation Of Vibrationsmentioning
The construction and the vibrational performance of a low vibration laboratory for microscopy applications comprising a 100 ton floating foundation supported by passive pneumatic isolators (air springs), which rest themselves on a 200 ton solid base plate, are discussed. The optimization of the air spring system leads to a vibration level on the floating floor below that induced by an acceleration of 10 ng for most frequencies. Additional acoustic and electromagnetic isolation is accomplished by a room-in-room concept.
“…However, in this study the possible maximum reduction of acceleration response of the platform without excessive drift is targeted to resist earthquake-induced building oor vibration. The absolute acceleration transmissibility R a and the drift transmissibility R d of the singlelayer passive platform can be expressed by Equation (1) and Equation (2), respectively, by assuming harmonic oor motion.…”
“…With reference to the rms velocity power spectrum density (PSD) function of oor vibration measured by Amick and Bui [2], the dominant frequencies in the four sinusoidal forces are selected as 20; 30; 59 and 75 Hz, respectively. The amplitudes of the four forces are taken as 5000; 10 000; 150 000 and 60 000 N, respectively, representing rotating machines of di erent sizes.…”
Section: Microvibration Control With Hybrid Platformmentioning
confidence: 99%
“…The measurement and prediction of tra c-induced ground motion and service machinery-induced oor vibration have been studied by many investigators [1][2][3]. These studies show that tra c-induced ground motion has a predominant frequency range, but it changes with the distance between vehicles and facility, type and speed of vehicles, soil conditions, and other factors.…”
SUMMARYTo ensure the high quality of ultra-precision products such as semiconductors and optical microscopes, high-tech equipment used to make these products requires a normal working environment with extremely limited vibration. Some of high-tech industry centres are also located in seismic zones: the safety of high-tech equipment during an earthquake event becomes a critical issue. It is thus imperative to ÿnd an e ective way to ensure the functionality of high-tech equipment against microvibration and to protect high-tech equipment from damage when earthquake events occur. This paper explores the possibility of using a hybrid platform to mitigate two types of vibration. The hybrid platform, on which high-tech equipment is installed, is designed to work as a passive isolation platform to abate mainly acceleration response of high-tech equipment during an earthquake and to function as an actively controlled platform to reduce mainly velocity response of high-tech equipment under normal working condition. To examine the performance of the hybrid platform, the analytical model of a coupled hybrid platform and building system incorporating with magnetostrictive actuators is established. The simulation results obtained by applying the analytical model to a high-tech facility indicate that the proposed hybrid platform is feasible and e ective.
SUMMARYThe experimental results of using a hybrid platform to mitigate vibration of a batch of high-tech equipment installed in a building subject to nearby tra c-induced ground motion have been presented and discussed in the companion paper. Based on the identiÿed dynamic properties of both the building and the platform, this paper ÿrst establishes an analytical model for hybrid control of the building-platform system subject to ground motion in terms of the absolute co-ordinate to facilitate the absolute velocity feedback control strategy used in the experiment. The tra c-induced ground motion used in the experiment is then employed as input to the analytical model to compute the dynamic response of the building-platform system. The computed results are compared with the measured results, and the comparison is found to be satisfactory. Based on the veriÿed analytical model, coupling e ects between the building and platform are then investigated. A parametric study is ÿnally conducted to further assess the performance of both passive and hybrid platforms at microvibration level. The analytical study shows that the dynamic interaction between the building and platform should be taken into consideration. The hybrid control is e ective in reducing both velocity response and drift of the platform/hightech equipment at microvibration level with reasonable control force.
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