1997
DOI: 10.1117/12.295123
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<title>Transfer function characterization of laser Fizeau interferometer for high-spatial-frequency phase measurements</title>

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Cited by 23 publications
(19 citation statements)
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“…We will use the same definition for the Fizeau transfer function which will be the ratio between the phase modulations. A few papers already dealt with the determination of a Fizeau interferometer transfer function [2][3][4]. Two main techniques are used.…”
Section: Methodsmentioning
confidence: 99%
“…We will use the same definition for the Fizeau transfer function which will be the ratio between the phase modulations. A few papers already dealt with the determination of a Fizeau interferometer transfer function [2][3][4]. Two main techniques are used.…”
Section: Methodsmentioning
confidence: 99%
“…The focal length of the f/6 collimator is about 600mm, which is folded by two pairs of mirrors to reduce the length of the interferometer. The System transfer function (STF) of the interferometer calculated by measuring a high quality phase step [2,3] is presented in Figure 2.It shows that the STF remains higher than 0.6 at spatial frequency less than2.49line/mm. …”
Section: Coherent Optical Interferometic System Designmentioning
confidence: 97%
“…The phase step is widely used to test the system transfer function of the interferometer by comparing the measured Power Spectral Density Function (PSD) of a step with those from a mathematically generated ideal step [5] . The PSD of a step of height H, measured with N data points over distance L is approximately:…”
Section: Phase Stepmentioning
confidence: 99%
“…A useful way to characterize such small-scale surface irregularities is by their spatial frequency power spectrum, which can be derived from surface profiles obtained by interferometric measurements [5] . However, to obtain reliable values of the spatial frequency power spectrum of irregularities with very small amplitudes over a wide range of spatial frequencies, it is essential to avoid two major sources of errors.…”
Section: Introductionmentioning
confidence: 99%