&lt;title&gt;UV-LIGA microfabrication and test of an ac-type micropump based on the magnetohydrodynamic (MHD) principle&lt;/title&gt;

Heng, Khee-Hang; Wang, Wanjun; Murphy, Michael C.; Lian, Kun

doi:10.1117/12.395655

Cited by 13 publications

(6 citation statements)

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“…In a typical setup, see Figure 13, a uniform magnetic field of strength B creates a controllable force (Lorentz force) F as a driving source in the flow for control and manipulation [114][115][116][117][118][119]. MHD (micro)pump can be fully described by a combination of Navier-Stokes equations of fluid dynamics and Maxwell's equations of electromagnetism.…”

Section: Mhd (Micro)pumpsmentioning

confidence: 99%

Magnetohydrodynamics in Biomedical Applications

Farrokhi¹,

Otuya²,

Khimchenko³

et al. 2020

Nanofluid Flow in Porous Media

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This chapter discusses recent advances in biomedical applications of magnetohydrodynamics (MHD). The magnetohydrodynamic (MDH) effect is a physical phenomenon describing the motion of a conducting fluid flowing under influencing of an external magnetic field. The chapter covers four primary areas of research: (1) laser beam scanning, (2) nano-particle manipulation, (3) imaging contrast enhancement, and (4) targeted drug delivery. The state-of-the-art devices based on magnetohydrodynamic principles are also presented, providing a broad view of biomedical MHDs. As the field of biomedical MHDs continues to grow, advances towards micro-scale transitions will continue to be made, maintaining its clinically driven nature and motion towards real-world applications.

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Section: Mhd (Micro)pumpsmentioning

confidence: 99%

Magnetohydrodynamics in Biomedical Applications

Farrokhi¹,

Otuya²,

Khimchenko³

et al. 2020

Nanofluid Flow in Porous Media

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“…The flow rates vary from 6,010 ll/min for the nozzle/diffuser micropump of Heng et al (1999) to 0.002 pl/min of Bao and Harrison (2003). Both AC and DC sources have been used (Bendib and Français 1999;Heng et al 2000;Heschel et al 1997;Huang et al 1999Huang et al , 2000. With regard to micromachining processes, bulk micromachining of silicon using LIGA, inductively coupled plasma reactive ion etching (ICP-RIE), and anisotropic wet etching together with soft lithography have been used.…”

Section: Introductionmentioning

confidence: 99%

High-current density DC magenetohydrodynamics micropump with bubble isolation and release system

Nguyen

Kassegne

2008

Microfluid Nanofluid

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One of the major challenges for integrated Labon-a-Chip (LOC) systems is the precise control of fluid flow in a micro-flow cell. Magnetohydrodynamics (MHD) micropumps which contain no moving parts and capable of generating a continuous flow in any ionic fluid offer an ideal solution for biological applications. MHD micropumping has been demonstrated by using both AC and direct current (DC) currents by a number of researchers with varying degrees of success. However, current MHD designs based on DC do not meet the flow rate requirements for fully automated LOC applications ([100 ll/ min). In this research, we introduce a novel DC-based MHD micropump which effectively increases flow rate by limiting the effects of electrolysis generated bubbles at the electrode-electrolyte interface through isolation and a mechanism for their release. Gas bubbles, particularly, hydrogen generated by high current density at the electrodes are the main culprit in low experimental flow rate compared with theoretical values. These tiny bubbles coalesce in the flow channel thus obstructing the flow of fluid. Since hydrolysis is inevitable with DC excitation, compartmentalized electrode channels with bubble isolating and coalescence retarding mechanisms and bubble release systems are implemented to prevent the coalescence of these bubbles and minimize their effects on flow rate. In this novel design called bubble isolation and release system, flow rate of up to 325 ll/min is achieved using 1 M NaCl solution in DC mode with potentials of 5 V and current density of about 5,000 A/m 2 for a main channel of 800 lm 9 800 lm cross-section and 6.4 mm length.

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“…They can be used to fabricate microstructures of metals and alloys on the order of hundreds, or thousands of micrometers in thickness with high precision. Various microstructures and microdevices have been fabricated using the technology (Konaka and Allen 1996;Kim and Allen 1998;Park and Allen 1999;Hang et al 2000;Liu et al 2001). Typical microsystems utilizing thick layers of metal or alloys include microrelays for power applications and electromagnetic microactuators (Yang et al 2003;Williams and Wang 2004a).…”

Section: Introductionmentioning

confidence: 99%

Experiment design and UV-LIGA microfabrication technology to study the fracture toughness of Ni microstructures

et al. 2005

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One of the major difficulties faced by MEMS researchers today is the lack of data regarding properties of electroplated metals or alloys of which microstructures and microdevices are fabricated, especially in LIGA technology. These mechanical properties cannot be extrapolated from macro-scale data without experimental verification. Therefore, study on material properties of microfabricated structures is of vital importance to the development of LIGA technology and to its industrial applications. This paper reports an experiment scheme and UV-LIGA microfabrication technology to study the fracture toughness of nickel micro specimens. The devised testing mechanism demonstrated compatibility with the fabricated samples and capability of performing the desired experimentation by generating resistance-to-fracture values of the nickel specimens. The same experiment scheme and sample fabrication technology can be used in future work to study the fracture toughness values for LIGA fabricated samples in various metals and alloys.

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<title>UV-LIGA microfabrication and test of an ac-type micropump based on the magnetohydrodynamic (MHD) principle</title>

Cited by 13 publications

References 0 publications

Magnetohydrodynamics in Biomedical Applications

Magnetohydrodynamics in Biomedical Applications

High-current density DC magenetohydrodynamics micropump with bubble isolation and release system

Experiment design and UV-LIGA microfabrication technology to study the fracture toughness of Ni microstructures

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