ABSTRACTconcentration up to 0.4 mol% in Y 2 O 3 and thereafter it decreases with further increase of Er 3+ concentration. Also, the intensity of low temperature TL glow peak (~422 K) increases with increasing ion fluence up to 1×10 12 ions cm -2 and decreases with further increase of ion fluences. The TL trap parameters were calculated by glow curve shape method and the deconvoluted glows were exhibit of second order kinetics.