2008
DOI: 10.1351/pac200880091893
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Macroscopic control of plasma polymerization processes

Abstract: Plasma polymerization covers a broad range of plasma deposits from soft to hard coatings. Nanoscale coatings are formed within a dry and eco-friendly process on different substrate materials and structures. To gain a deeper insight into plasma polymerization, a macroscopic approach using the concept of chemical quasi-equilibria might be useful. Following this macroscopic approach, the reaction parameter power input per gas flow W/F, which represents the specific energy invested per particle within the active p… Show more

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Cited by 24 publications
(29 citation statements)
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“…Both Yasuda and Hegemann approaches report an initial linear increase of R D with φ followed by a decrease of R D depending on the wattage used. Our observations are therefore in line with the state of the art …”
Section: Resultssupporting
confidence: 91%
“…Both Yasuda and Hegemann approaches report an initial linear increase of R D with φ followed by a decrease of R D depending on the wattage used. Our observations are therefore in line with the state of the art …”
Section: Resultssupporting
confidence: 91%
“…Fluorocarbons, however, show a different behavior, since the surface itself can be the source for film-forming species such as CF 2 (74). Fluorocarbons, however, show a different behavior, since the surface itself can be the source for film-forming species such as CF 2 (74).…”
Section: Further Monomersmentioning
confidence: 99%
“…[15,49] The use of Equations (1)- (4) provides useful information for the control, the investigation and the up-scaling of plasma polymerization processes (regarding both surface and gas phase processes). [50] a-C:H First, pure hydrocarbon discharges with ethylene (C 2 H 4 ) were examined in order to enable a comparison with the oxygen-containing hydrocarbon coatings. Two sets of experiments were performed with low (8 sccm) and high (16 sccm) monomer gas flow covering an overlapping range of specific energy input W/F.…”
Section: à5mentioning
confidence: 99%