“…Depending on the processing conditions, materials can be obtained with specific mechanical, magnetic and optical properties, microstructures, and surface textures. For example, Gan et al [21] investigated the structural properties of Cu2O-epitaxial films, Sun et al [22] determined the optical and electrical performance of thermochromic V2O3 thin films, Cao and Zhou [23,24] determined the magnetic properties of CoZrNb and FeNiCr films, Mirzaee et al [25] examined the surface textures of ZnO films, Rode et al [26] studied effects of deposition rate on surface roughness of Al films, Zenkin et al [27] investigated the thickness dependence of wettability and surface properties of HfO2 thin films, Han et al [28] explored the composition and structure of TiHxHe films, Gudla et al [29] investigated the microstructure evolution of AlZr and AlZrSi coatings during heat treatment processes, Kobata and Miura [30] examined the mechanical and thermal properties of TiCuZrNiHfSi thin films, Pshyk et al [31] analyzed the structural, morphological and tribo-mechanical properties of AlNTiB2TiSi2 coatings, and Mazur et al [32] investigated structural, optical, and micro-mechanical properties of (NdyTi1−y)Ox thin films produced by magnetron sputtering. Moreover, effects of the magnetron sputtering processing on the surface roughness of ultra-thin films are investigated in different studies [33][34][35][36][37].…”