Magnetic properties and high frequency characteristic of obliquely sputtered Co–M (M=V and Nb) thin films

Chang, H. W.; Huang, Yajing; Hsieh, C.C.; Shih, C. W.; Chang, W.C.; Xue, Desheng

doi:10.1016/j.jallcom.2012.05.099

Cited by 11 publications

(3 citation statements)

References 18 publications

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“…In brief, magnetic thin films are considered as the potential candidate for thin-film inductors with an aim to improve their M s , H k , ρ, and also compatibility with semiconductor manufacturing processes. Therefore, tremendous efforts have been devoted to developing better magnetic thin films over past decades [3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19].…”

Section: Introductionmentioning

confidence: 99%

Soft Magnetic Properties of High-Entropy Fe-Co-Ni-Cr-Al-Si Thin Films

Lin

Cheng

Chin

2016

Entropy

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Soft magnetic properties of Fe-Co-Ni-Al-Cr-Si thin films were studied. As-deposited Fe-Co-Ni-Al-Cr-Si nano-grained thin films showing no magnetic anisotropy were subjected to field-annealing at different temperatures to induce magnetic anisotropy. Optimized magnetic and electrical properties of Fe-Co-Ni-Al-Cr-Si films annealed at 200 • C are saturation magnetization 9.13 × 10 5 A/m, coercivity 79.6 A/m, out-of-plane uniaxial anisotropy field 1.59 × 10 3 A/m, and electrical resistivity 3.75 µΩ·m. Based on these excellent properties, we employed such films to fabricate magnetic thin film inductor. The performance of the high entropy alloy thin film inductors is superior to that of air core inductor.

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Section: Introductionmentioning

confidence: 99%

Soft Magnetic Properties of High-Entropy Fe-Co-Ni-Cr-Al-Si Thin Films

Lin

Cheng

Chin

2016

Entropy

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“…As the development of communications and information technology, the continous demands for miniaturization and integration of transforms, inductors, and other communication electromagnetic equipment. In addition, with the frequency of Radio Frequency Integrated Circuits (RFICs) increased to gigahertz (GHz), the research of high-frequency magnetic materials has been greatly promoted [1][2][3]. At the same time, the miniaturization, high frequency and integration of inductors are the key to realize magnetic electronic products [4][5][6].…”

Section: Introductionmentioning

confidence: 99%

Modulation of Operating Cut-Off Frequency by Spin Pinned of Fe/Ni<sub>81</sub>Fe<sub>19</sub>/ Fe Heterogenous Multilayer Films with Different Fe Thicknesses

Wang

et al. 2022

SSP

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Multilayer films exhibit high saturation magnetization, high permeability, and high cutoff frequency fr, applying to magnetic inductors that satisfy both high frequency, miniaturization, and integration. In this work, we fabricate Fe/Ni81Fe19/Fe (t/100/t nm) multilayer films on Si (100) using electron beam evaporation, and investigate the Fe thickness dependence of surface morphology, saturation magnetization, coercivity, and ferromagnetic resonance fr. The results demonstrate that Fe/Ni81Fe19/Fe (4/100/4 nm) multilayer film possess relatively high saturation magnetization (12.1 kGs), low coercivity (3.1 Oe), and high ferromagnetic resonance fr (1.93 GHz).

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“…The dominate microwave performance in MMICs is ferromagnetic resonance frequency f FMR , while the key approach to enhance f FMR is to increase the anisotropy magnetic field H K , as described by Kittel equation [7]. Many preparation methods were proposed to obtain a high H K , such as in-situ magnetic field deposition [8,9], post magnetic annealing, oblique sputtering [10,11], exchange coupling between ferromagnetic (FM) layer and antiferromagnetic (AFM) layer or FM layer with higher coercivity [12,13], and magnetoelectric (ME) coupling [14,15]. In our previous work [16][17][18][19], a novel composition gradient sputtering (CGS) method was applied to achieve a high uniaxial magnetic anisotropy in SMFs, which dramatically increased the in-plane uniaxial H K to 547 Oe due to the uniaxial stress distribution induced by composition gradient.…”

Section: Introductionmentioning

confidence: 99%