Magnetic properties of Fe-Ta-(b)-N films

Abstract

Magnetic Devices Research Lab., Matsushita E l e c t r i c I nd. Co., L td.Abstract--I n-plane magnetic anisotropy and thickness dependence of soft magnetic properties for Fe-T a -N films near the eutectic composition, annealed either in a rotating magnetic field, in a static field or with no magnetic field were investigated in detail. The soft magnetic films were prepared by r. f. reactive sputtering. The films with thicknesses greater than around 2 pm have good soft magnetic properties. For those with thicknesses less than around 1 pm, the soft magnetic properties deteriorate and the domain structure changes with decreasing thickness. The films annealed without magnetic field or in a rotating field have an isotropic high permeability ( p ' 85000 at 1 M H z ) and a low anisotropy field ( H r z 5 0 A/m), whereas for the films annealed in a static field, uniaxial anisotropy is induced. This anisotropy increases with increasing N concentration. Moreover, B was added to Fe-Ta-N system, and the relation between the structures and soft magnetic properties of Fe-To-B-N films was investigated. By adding B to F e -T a -N system, the thermal stability of soft magnetic properties is improved, because the growth of a -F e and Ta-(N, B ) grains is suppressed during annealing at higher temperatures.

Microstructure and magnetic properties of FeCoN thin films

“…Recently, extensive efforts have been made to improve the soft magnetic properties of Fe-based films. [1][2][3][4][5][6][7] According to the Pauling-Slater curve, Fe-Co alloys have the highest magnetization of iron alloy. Takahashi et al 8 prepared FeCo nitride film onto a polyimide substrate by ionassisted normally vapor deposition method.…”