Magnetically actuated swing-type micromirror

Chang, Hsu-Tang; Tsai, Chun‐Wei; Liu, Shih-Hsiang; Tsai, Jui-che

doi:10.1109/omn.2013.6659064

Cited by 2 publications

(2 citation statements)

References 3 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…However, it also has certain disadvantages, due to the limitation of the MEMS process, it can not prepare a torsional structure such as bearings [6] , which leads to the limited torsion Angle of MEMS micromirror, which is very unfavorable for the application end. In addition, there are four driving methods of MEMS torsional mirrors, including electromagnetic drive [7] , electrostatic drive, electric heating drive [8] , and piezoelectric drive [9] . Although the electromagnetic drive has a large torque output, it is difficult to control and has poor stability due to the influence of travel and motion state.…”

Section: Introductionmentioning

confidence: 99%

Design of planar comb-driven MEMS torsional mirror

Nie,

Zhai,

Zhao

2024

J. Phys.: Conf. Ser.

View full text Add to dashboard Cite

The MEMS torsional mirror is an important MEMS optical device, and its related applications are very wide, including LiDAR, projection equipment, optical communication, and so on. At present, the electrostatically driven MEMS torsional mirror mainly adopts a vertical comb driver to achieve torsional motion, which has some disadvantages such as a complicated manufacturing process, low yield, and high driving voltage. In this paper, a novel MEMS torsional mirror structure is proposed, which provides flexible elastic constraint points for the torsional mirror with the bottom support rod structure as the center, and relies on the combination of planar comb and support rod to form a tie rod structure to achieve torsion, and achieves a torsion Angle of ±15.55° under the driving voltage of 65 V. The use of a planar comb instead of a vertical comb greatly reduces the difficulty of manufacturing. Finally, it is verified that the system stability is good, the correlation drift does not affect the results within the range, the fifth-order modes are within the reasonable range, and the maximum stress is 671 MPa, which is controlled within the range of fracture stress of silicon material.

show abstract

Section: Introductionmentioning

confidence: 99%

Design of planar comb-driven MEMS torsional mirror

Nie,

Zhai,

Zhao

2024

J. Phys.: Conf. Ser.

View full text Add to dashboard Cite

show abstract

“…With their achieved swing angles, the mirrors are capable of system fine adjustment and reconfiguration. Some preliminary results of a single mirror of one design were reported recently [26]. This paper presents the comprehensive study, covering mirrors of different designs, mirror pairs of different arrangements, optical setup experiments, etc., and includes more details such as the device cross sections and assembly steps.…”

Section: Introductionmentioning

confidence: 99%

Magnetically-Actuated Swing-Type MEMS Mirror Pair for a Reconfigurable Optical Interconnect

Tsai

Chang

Liu

et al. 2013

J. Lightwave Technol.

Self Cite

View full text Add to dashboard Cite

Two different mirror pairs of 45 • -assembled swingtype micro-electro-mechanical systems mirrors for optical interconnects are proposed. Magnetic beads are attached to the back of the mirror plate to enable magnetic actuation. The device is fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. The magnetically-actuated micromirror provides a wide swing angle. The mirror swing angle is also sufficiently wide to enable fine tuning and system reconfiguration. Two designs of torsion springs are employed. The full swing angles are 16.9 • and 9.8 • for the mirrors in the roof-type arrangement pair and parallel-arrangement pair, respectively.

show abstract

Magnetically actuated swing-type micromirror

Cited by 2 publications

References 3 publications

Design of planar comb-driven MEMS torsional mirror

Design of planar comb-driven MEMS torsional mirror

Magnetically-Actuated Swing-Type MEMS Mirror Pair for a Reconfigurable Optical Interconnect

Contact Info

Product

Resources

About