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Three different electrothermally-actuated MEMS micromirrors with Cr/Au-Si bimorph actuators are proposed. The devices are fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. (Durham, NC, USA). A silicon-on-insulator MEMS process has been employed for the fabrication of these micromirrors. Electrothermal actuation has achieved a large angular movement in the micromirrors. Application of an external electric current 0.04 A to the bending-type, restricted-torsion-type, and free-torsion-type mirrors achieved rotation angles of 1.69°, 3.28°, and 3.64°, respectively.

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Two different mirror pairs of 45 • -assembled swingtype micro-electro-mechanical systems mirrors for optical interconnects are proposed. Magnetic beads are attached to the back of the mirror plate to enable magnetic actuation. The device is fabricated with the SOIMUMPs process developed by MEMSCAP, Inc. The magnetically-actuated micromirror provides a wide swing angle. The mirror swing angle is also sufficiently wide to enable fine tuning and system reconfiguration. Two designs of torsion springs are employed. The full swing angles are 16.9 • and 9.8 • for the mirrors in the roof-type arrangement pair and parallel-arrangement pair, respectively.