Magnetically Excited Piezoelectric Energy Harvester for Micropower Supply and Wakeup Applications

Gojdka, Björn; Dankwort, Torben; Nowak, Marc A.; Bodduluri, Mani Teja; Ahmed, Minhaz; Grünzig, Sven; Lofink, Fabian

doi:10.1109/transducers50396.2021.9495625

Cited by 4 publications

(2 citation statements)

References 12 publications

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“…Thus, frequency upconversion from both strong mechanical as well as magnetic-pulse-like excitations can be utilized, making it possible to harvest energy at low excitation frequencies of <50 Hz with power outputs of >70 µW [ 26 ]. Notably, it was further demonstrated that the generated power is sufficient to switch an NMOS and to initiate near-zero-power wake-up [ 29 ]. Apart from that, magnetic field detection with an ultralow limit of detection of 7.2 pT/Hz 0.5 –8.5 pT/Hz 0.5 in resonance has been demonstrated [ 30 ].…”

Section: Applicationsmentioning

confidence: 99%

PowderMEMS—A Generic Microfabrication Technology for Integrated Three-Dimensional Functional Microstructures

2022

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A comprehensive overview of PowderMEMS—a novel back-end-of-line-compatible microfabrication technology—is presented in this paper. The PowderMEMS process solidifies micron-sized particles via atomic layer deposition (ALD) to create three-dimensional microstructures on planar substrates from a wide variety of materials. The process offers numerous degrees of freedom for the design of functional MEMSs, such as a wide choice of different material properties and the precise definition of 3D volumes at the substrate level, with a defined degree of porosity. This work details the characteristics of PowderMEMS materials as well as the maturity of the fabrication technology, while highlighting prospects for future microdevices. Applications of PowderMEMS in the fields of magnetic, thermal, optical, fluidic, and electrochemical MEMSs are described, and future developments and challenges of the technology are discussed.

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Section: Applicationsmentioning

confidence: 99%

PowderMEMS—A Generic Microfabrication Technology for Integrated Three-Dimensional Functional Microstructures

2022

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“…The so-called PowderMEMS technique is compatible with standard MEMS processes [30,31]. Using PowderMEMS, a piezoelectric vibrational energy harvester with wafer-level integrated, rare earth permanent micromagnets was demonstrated [32][33][34]. To the best of our knowledge, this is the first MEMS energy harvester featuring integrated rare-earth magnets, which is completely fabricated on the wafer-level by MEMS and semiconductor processes, allowing large-scale production.…”

Section: Introductionmentioning

confidence: 99%

Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies

Bodduluri¹,

Dankwort²,

Lisec³

et al. 2022

Micromachines

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Energy harvesting and storage is highly demanded to enhance the lifetime of autonomous systems, such as IoT sensor nodes, avoiding costly and time-consuming battery replacement. However, cost efficient and small-scale energy harvesting systems with reasonable power output are still subjects of current development. In this work, we present a mechanically and magnetically excitable MEMS vibrational piezoelectric energy harvester featuring wafer-level integrated rare-earth micromagnets. The latter enable harvesting of energy efficiently both in resonance and from low-g, low-frequency mechanical energy sources. Under rotational magnetic excitation at frequencies below 50 Hz, RMS power output up to 74.11 µW is demonstrated in frequency up-conversion. Magnetic excitation in resonance results in open-circuit voltages > 9 V and RMS power output up to 139.39 µW. For purely mechanical excitation, the powder-based integration process allows the realization of high-density and thus compact proof masses in the cantilever design. Accordingly, the device achieves 24.75 µW power output under mechanical excitation of 0.75 g at resonance. The ability to load a capacitance of 2.8 µF at 2.5 V within 30 s is demonstrated, facilitating a custom design low-power ASIC.

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High-performance Aluminum Scandium Nitride MEMS energy harvester with wafer-level integrated micromagnets for contactless rotational motion harvesting

Dankwort

Ahmed

Grünzig

et al. 2023

2023 IEEE International Conference on Mechatronics (ICM)

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Magnetically Excited Piezoelectric Energy Harvester for Micropower Supply and Wakeup Applications

Cited by 4 publications

References 12 publications

PowderMEMS—A Generic Microfabrication Technology for Integrated Three-Dimensional Functional Microstructures

PowderMEMS—A Generic Microfabrication Technology for Integrated Three-Dimensional Functional Microstructures

Fully Integrated High-Performance MEMS Energy Harvester for Mechanical and Contactless Magnetic Excitation in Resonance and at Low Frequencies

High-performance Aluminum Scandium Nitride MEMS energy harvester with wafer-level integrated micromagnets for contactless rotational motion harvesting

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