Magnetoelectric Magnetic Field Sensors: A Review

Бичурин, М. И.; Петров, Р. В.; Sokolov, Oleg; Leontiev, V. S.; Kuts, Victor V.; Киселев, Д. А.; Wang, Yaojin

doi:10.3390/s21186232

Cited by 65 publications

(32 citation statements)

References 68 publications

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“…Our best samples exhibited a record detectivity among ME composites as low as 92 fT/Hz 1/2 at a bending resonance frequency of 6862 Hz [ 7 ]. Furthermore, bulk crystals of b-LN with a y + 128°-cut possess a relatively high value of |d/ε| = 0.55 pm/V [ 38 ]. ME heterostructures based on b-LN y + 140°-cut/metglas demonstrate a high Q-factor of 1100 [ 7 ].…”

Section: Introductionmentioning

confidence: 99%

Magnetoelectric MEMS Magnetic Field Sensor Based on a Laminated Heterostructure of Bidomain Lithium Niobate and Metglas

et al. 2023

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Non-contact mapping of magnetic fields produced by the human heart muscle requires the application of arrays of miniature and highly sensitive magnetic field sensors. In this article, we describe a MEMS technology of laminated magnetoelectric heterostructures comprising a thin piezoelectric lithium niobate single crystal and a film of magnetostrictive metglas. In the former, a ferroelectric bidomain structure is created using a technique developed by the authors. A cantilever is formed by microblasting inside the lithium niobate crystal. Metglas layers are deposited by magnetron sputtering. The quality of the metglas layers was assessed by XPS depth profiling and TEM. Detailed measurements of the magnetoelectric effect in the quasistatic and dynamic modes were performed. The magnetoelectric coefficient |α32| reaches a value of 492 V/(cm·Oe) at bending resonance. The quality factor of the structure was Q = 520. The average phase amounted to 93.4° ± 2.7° for the magnetic field amplitude ranging from 12 to 100 pT. An AC magnetic field detection limit of 12 pT at a resonance frequency of 3065 Hz was achieved which exceeds by a factor of 5 the best value for magnetoelectric MEMS lead-free composites reported in the literature. The noise level of the magnetoelectric signal was 0.47 µV/Hz1/2. Ways to improve the sensitivity of the developed sensors to the magnetic field for biomedical applications are indicated.

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Section: Introductionmentioning

confidence: 99%

Magnetoelectric MEMS Magnetic Field Sensor Based on a Laminated Heterostructure of Bidomain Lithium Niobate and Metglas

et al. 2023

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“…The main characteristic of the ME composite in the case of a direct effect is the ME voltage coefficient, which is the ratio of the induced electric field to the alternating magnetic field acting on the composite. There are numerous works devoted to the calculation of individual characteristics of ME composites [4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19][20] and examples of the development of various ME devices: sensors [21][22][23][24][25][26][27][28], gyrators [29,30], harvesters [31][32][33], antennas [34,35], and microwave devices [3,36]. The information in the literature concerns the calculations of the ME effect for individual electromechanical (EMR) regimes [6][7][8][9][10][11][12][13][14][15][16][17]…”

Section: Introductionmentioning

confidence: 99%

Physics of Composites for Low-Frequency Magnetoelectric Devices

Бичурин

Sokolov

Иванов

et al. 2022

Sensors

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The article discusses the physical foundations of the application of the linear magnetoelectric (ME) effect in composites for devices in the low-frequency range, including the electromechanical resonance (EMR) region. The main theoretical expressions for the ME voltage coefficients in the case of a symmetric and asymmetric composite structure in the quasi-static and resonant modes are given. The area of EMR considered here includes longitudinal, bending, longitudinal shear, and torsional modes. Explanations are given for finding the main resonant frequencies of the modes under study. Comparison of theory and experimental results for some composites is given.

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“…Magnetoelectric sensors based on multilayer thin films have great potential [ 13 , 14 , 15 ] for the detection of magnetic signals near non-resonant frequencies, especially for quasi-static and low-frequency magnetic fields. Using the direct magnetoelectric effect, the magnetoelectric composite films have high electrical noise caused by parasitic impedance and small magnetoelectric coupling coefficient in nonresonant regimes, resulting in low magnetoelectric sensitivity [ 9 , 12 , 16 ].…”

Section: Introductionmentioning

confidence: 99%

Modeling and Parameter Sensitivity Improvement in ΔE-Effect Magnetic Sensor Based on Mode Localization Effect

Lyu

Wang

et al. 2022

Micromachines

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A mode-localized ΔE-effect magnetic sensor model is established theoretically and numerically. Based on the designed weakly coupled resonators with multi-layer film structure, it is investigated how the ΔE-effect of the magnetostrictive film under the external magnetic field causes the stiffness perturbation of the coupled resonators to induce the mode localization effect. Using the amplitude ratio (AR) as the output in the mode-localized ΔE-effect magnetic sensor can improve the relative sensitivity by three orders of magnitude compared with the traditional frequency output, which has been verified by simulations based on the finite element method (FEM). In addition, the effects of material properties and geometric dimensions on sensor performance parameters, such as sensitivity, linear range, and static operating point are also analyzed and studied in detail, providing the theoretical basis for the design and optimization of the mode-localized ΔE-effect magnetic sensor in different application scenarios. By reasonably optimizing the key parameters of the weekly coupled resonators, a mode-localized ΔE-effect magnetic sensor with the sensitivity of 18 AR/mT and a linear range of 0.8 mT can be achieved.

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Magnetoelectric Magnetic Field Sensors: A Review

Cited by 65 publications

References 68 publications

Magnetoelectric MEMS Magnetic Field Sensor Based on a Laminated Heterostructure of Bidomain Lithium Niobate and Metglas

Magnetoelectric MEMS Magnetic Field Sensor Based on a Laminated Heterostructure of Bidomain Lithium Niobate and Metglas

Physics of Composites for Low-Frequency Magnetoelectric Devices

Modeling and Parameter Sensitivity Improvement in ΔE-Effect Magnetic Sensor Based on Mode Localization Effect

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